Target of high-purity nickel or nickel alloy and its producing method
View Patent ↗Provided is high purity nickel or nickel alloy target for Magnetron sputtering having superior sputtering film uniformity and in which the magnetic permeability of the target is 100 or more, and this high purity nickel or a nickel alloy target for magnetron sputtering capable of achieving a favorable film uniformity (evenness of film thickness) and superior plasma ignition (firing) even during the manufacturing process employing a 300 mm wafer. The present invention also provides the manufacturing method of such high purity nickel or nickel alloy target.
1. A method of manufacturing a high purity nickel target for magnetron sputtering, comprising the steps of:
hot forging a high purity nickel having a purity of at least 4N5 (99.995 wt %);
after said hot forging step, cold rolling said high purity nickel at a rolling rate of 30% or more, and further performing heat treatment thereto for recrystallization at a temperature of 300° C. or higher; and
repeating said cold rolling and heat treatment steps two or more times to produce a high purity nickel sputtering target having a magnetic permeability of 100 or more.
2. A method according to claim 1 , wherein said heat treatment is at a temperature of 300° C. to 600° C.
3. A method of manufacturing a high purity nickel alloy target for magnetron sputtering, comprising the steps of:
hot forging a high purity nickel alloy consisting of nickel having a purity of at least 4N5 (99.995 wt %) and 0.5 to 7 at % of an alloying element;
after said hot forging step, cold rolling said high purity nickel alloy at a rolling rate of 30% or more, and further performing heat treatment thereto for recrystallization at a temperature of 300° C. or higher; and
repeating said cold rolling and heat treatment steps two or more times to produce a high purity nickel alloy sputtering target having a magnetic permeability of 100 or more.
4. A method according to claim 3 , wherein said heat treatment is at a temperature of 300° C. to 600° C.