Method for producing two gates controlling the same channel
View Patent ↗A semiconductor process and apparatus use a predetermined sequence of patterning and etching steps to etch a gate stack ( 62 ) formed over a substrate ( 11 ) and a first spacer structure ( 42 ), thereby forming etched gate structures ( 72, 74 ) that are physically separated from one another but that control a substrate channel ( 71 ) subsequently defined in the substrate ( 11 ) by source/drain regions ( 82, 102, 84, 104 ) that are implanted around the etched gate structures ( 72, 74 ). Depending on how the first spacer structure ( 42 ) is positioned and configured, the channel ( 71 ) may be controlled to provide either a logical AND gate ( 100 ) or logical OR gate ( 200 ) functionality.
1. A method for forming a semiconductor device comprising:
forming first spacer structure having first and second sidewalls over a substrate;
forming first and second etched gate structures on a first dielectric layer adjacent to the first and second sidewalls of the first spacer structure; and
forming first and second source/drain regions in the substrate adjacent to the first and second etched gate structures, said first and second source/drain regions defining a channel that is controlled by the first and second etched gate structures.
2. The method of claim 1 , where forming the first spacer structure comprises forming a thin patterned nitride layer on the substrate that is located between subsequently defined first and second source/drain regions.
3. The method of claim 1 , where forming the first spacer structure comprises forming a thin patterned nitride layer on the substrate that bridges between subsequently defined first and second source/drain regions.
4. The method of claim 1 , where forming first and second etched gate structures comprises:
depositing a polysilicon layer over the substrate and first spacer structure; and
anisotropically etching the polysilicon layer to form first and second etched gate structures on each side of the first spacer structure.
5. The method of claim 4 , further comprising:
masking at least a portion of a first circuit area after anisotropically etching the polysilicon layer to leave exposed a second circuit area and parts of the first circuit area in regions where the first and second etched gate structures are electrically connected; and
etching the polysilicon layer to define one or more gate electrode structures in the second circuit area and to simultaneously disconnect any electrically connected first and second etched gate structures exposed in the first circuit area.
6. The method of claim 1 , further comprising forming the first dielectric layer on the substrate prior to forming the first spacer structure.
7. The method of claim 1 , further comprising depositing the first dielectric layer over the substrate and first spacer structure after forming the first spacer structure.
8. The method of claim 1 , where forming first and second source/drain regions comprises:
forming sidewall spacers adjacent to the first and second etched gate structures; and
implanting ions having a predetermined conductivity type around the sidewall spacers and into the substrate.
9. The method of claim 1 , further comprising:
electrically connecting the first etched gate structure to a first device input;
electrically connecting the second etched gate structure to a second device input;
electrically connecting the first source/drain region to a predetermined voltage; and
electrically connecting the second source/drain region to a device output, thereby forming a logic gate device.
10. The method of claim 9 , where the logic gate device comprises a logical AND gate device.
11. The method of claim 9 , where the logic gate device comprises a logical OR gate device.
12. A method for forming a transistor having two gates for controlling a shared channel, comprising:
forming a gate dielectric layer on a substrate;
forming a nitride fin over the gate dielectric layer;
depositing a polysilicon layer over the nitride fin and gate dielectric layer;
anisotropically etching at least the polysilicon layer in a first circuit area to form first and second gate structures adjacent the nitride fin; and
forming first and second source/drain regions in the substrate adjacent to the first and second gate structures, said first and second source/drain regions defining a shared channel that is controlled by the first and second gate structures.
13. The method of claim 12 , further comprising:
forming a masking layer after anisotropically etching at least the polysilicon layer to leave exposed at least a second circuit area;
etching the polysilicon layer to define one or more gate electrode structures in the second circuit area.
14. The method of claim 13 , where etching the polysilicon layer to define one or more gate electrode structures in the second circuit area simultaneously etches first and second etched gate structures in the first circuit area that are electrically connected, thereby disconnecting any electrically connected first and second etched gate structures exposed in the first circuit area.
15. The method of claim 12 , where forming the nitride fin on a substrate comprises forming a thin patterned nitride layer on the substrate that is located between subsequently defined first and second source/drain regions.
16. The method of claim 12 , where forming a nitride fin on a substrate comprises forming a thin patterned nitride layer on the substrate that bridges between subsequently defined first and second source/drain regions.
17. The method of claim 12 , further comprising masking a second circuit area to leave exposed the first circuit area after depositing the polysilicon layer and before anisotropically etching at least the polysilicon layer.
18. The method of claim 12 , further comprising etching any exposed gate dielectric layer after anisotropically etching at least the polysilicon layer in the first circuit area.
19. The method of claim 12 further comprising:
electrically connecting the first gate structure to a first device input;
electrically connecting the second gate structure to a second device input;
electrically connecting the first source/drain region to a predetermined voltage; and
electrically connecting the second source/drain region to a device output, thereby forming a logic gate device comprising a logical AND gate device or a logical OR gate device.
20. A method for fabricating two gates controlling a single channel, comprising:
forming a spacer structure over a substrate;
depositing a first polysilicon layer over the spacer structure;
anisotropically etching the first polysilicon layer to form first and second poly gates adjacent to the spacer structure; and
forming first and second source/drain regions in the substrate adjacent to the first and second poly gates, said first and second source/drain regions defining a single channel that is controlled by the first and second poly gates.