IP Library Granted Patent US 7,432,130
Granted Patent B2
US 7,432,130 · App. 11/341,303 · Granted Oct 7, 2008

Method of packaging semiconductor die without lead frame or substrate

Assignee: Freescale Semiconductor, Inc.
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Quick Facts
Patent No.
US 7,432,130
App. No.
11/341,303
Granted
Oct 7, 2008
Kind
B2
Abstract

A method of packaging a semiconductor die ( 10 ) includes providing a flip-chip die ( 10 ) with bump connections ( 12 ) on its bottom surface ( 14 ). An adhesive tape ( 18 ) is attached to a plate surface ( 16 ) and lead fingers ( 20 ) are formed on the tape ( 18 ). The die ( 10 ) is placed on the tape ( 18 ) such that the bumps ( 12 ) on the die ( 10 ) contact respective ones of the lead fingers ( 20 ) on the tape ( 18 ). A reflow process is performed on the die ( 10 ), the tape ( 18 ) and the plate ( 16 ), which forms C5 type interconnects. A mold compound ( 24 ) is formed over the die ( 10 ) and the tape ( 18 ), and then the tape ( 18 ) and the plate ( 16 ) are removed.

Claims (21)

1. A method of packaging a semiconductor die, comprising:

attaching an adhesive tape to a plate surface;

forming lead fingers on the tape;

forming a heat sink on the tape;

providing a semiconductor IC die with bonding pads on a top surface thereof;

placing a bottom surface of the die on the heat sink;

electrically connecting respective ones of the die bonding pads with respective ones of the tape lead fingers with a plurality of wires, wherein the connections of the wires to the lead fingers are ball bonds;

performing a reflow process on the die, the tape and the plate, wherein the ball bonds and the lead fingers melt during the reflow process and form controlled collapse chip carrier connection (C5) type interconnects when cooled;

performing a molding process, wherein a mold compound is formed over the die and the tape; and

removing the tape and the plate such that the heat sink and a surface of the C5 type interconnects are exposed.

2. The method of packaging a semiconductor die of claim 1 wherein the bumps and the lead fingers melt during the reflow process and form controlled collapse chip carrier connection (C5) type interconnects when cooled.

3. The method of packaging a semiconductor die of claim 2 , further comprising grinding the packaged die to expose the C5 type interconnects.

4. The method of packaging a semiconductor die of claim 1 , wherein the adhesive tape is a high temperature tape.

5. The method of packaging a semiconductor die of claim 4 , wherein the tape is able to withstand temperatures greater than about 360° C.

6. The method of packaging a semiconductor die of claim 1 , wherein the bumps are in one of an area array and a peripheral array configuration.

7. The method of packaging a semiconductor die of claim 6 , wherein the die is less than or equal to about 10 mm by about 10 mm in size.

8. The method of packaging a semiconductor die of claim 1 , wherein the lead fingers and the heat sink are formed on the tape by solder cladding.

9. The method of packaging a semiconductor die of claim 8 , wherein the lead fingers have a thickness of about 18 microns.

10. The method of packaging a semiconductor die of claim 1 , wherein the plate is reusable.

11. The method of packaging a semiconductor die of claim 10 , wherein the plate is made of one of copper, ceramic, and stainless steel.

12. The method of packaging a semiconductor die of claim 1 , wherein the die, the tape and the plate are reflowed at a temperature of about 220° C.

Assignments (23)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE LISTED CHANGE OF NAME SHOULD BE MERGER AND CHANGE PREVIOUSLY RECORDED AT REEL: 040652 FRAME: 0180. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME. Recorded Jan 12, 2017
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 041354/0148 →
CHANGE OF NAME Recorded Nov 8, 2016
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 040652/0180 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0143 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037356/0553 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037354/0807 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037354/0225 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030633/0424 →
SECURITY AGREEMENT Recorded May 13, 2010
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 024397/0001 →
SECURITY AGREEMENT Recorded Mar 12, 2009
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A.
Reel/Frame 022380/0409 →
SECURITY AGREEMENT Recorded Feb 2, 2007
From: FREESCALE SEMICONDUCTOR, INC.; FREESCALE ACQUISITION CORPORATION; FREESCALE ACQUISITION HOLDINGS CORP.; FREESCALE HOLDINGS (BERMUDA) III, LTD.
To: CITIBANK, N.A. AS COLLATERAL AGENT
Reel/Frame 018855/0129 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2006
From: ISMAIL, AMINUDDIN; FOONG, CHEE SENG; IBRAHIM, RUAZINI
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 017536/0327 →
Continuity (1)
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