Recessed poly extension T-gate
View Patent ↗A method is provided for making a silicided gate in a semiconductor device. In accordance with the method, a gate ( 213 ) is provided which comprises a first portion ( 214 ) and a second portion ( 213 ). The first portion of the gate has a width w 1 and the second portion of the gate has a width w 2 as taken along a plane perpendicular to the length of the gate, wherein w 2 >w 1 . A layer is silicide ( 231 ) is then formed on the second portion.
1. A method for making a silicided gate, comprising:
providing a gate comprising a first portion and a second portion, wherein the first portion has a width w 1 and the second portion has a width w 2 as taken along a plane perpendicular to the length of the gate, and wherein w 2 >w 1 ; and
forming a layer of suicide on the second portion of the gate;
wherein the gate is disposed on a substrate having at least one recess formed therein which is adjacent to the gate, wherein the second portion of the gate is formed by an epitaxial growth process, and wherein the epitaxial growth process at least partially fills the at least one recess and; wherein w 1 <50 nm; and wherein w 2 >50 nm.
2. The method of claim I, wherein the gate has at least one spacer adjacent thereto which is separated from the gate at least partially by a dielectric layer, and wherein the second portion of the gate is formed by a process that includes the step of etching the dielectric layer to produce a gap between the gate and the spacer.
3. The method of claim 2 , further comprising the step of depositing a gate material in the gap.
4. The method of claim 3 , wherein the gate material is polysilicon.
5. The method of claim 4 , wherein the step of depositing a gate material in the gap includes the steps of depositing a layer of the gate material over the gap, and etching back the deposited gate material.
6. The method of claim 2 , further comprising the step of epitaxially growing the gate material in the gap.
7. The method of claim 6 , wherein the step of epitaxially growing the gate material in the gap results in epitaxial growth in the substrate which at least partially fills the at least one recess.
8. The method of claim 7 , wherein the at least partially filled substrate forms a source or drain region of the device.
9. The method of claim 8 , wherein the at least one recess has a maximum depth d t , wherein the gap has a maximum depth d g , and wherein d g ≧d t .
10. The method of claim 1 , wherein the second portion of the gate is formed by creating a mask over the first portion of the gate, and epitaxially growing the second portion of the gate in an opening in the mask.
11. The method of claim 1 , wherein the second portion of the gate is formed by:
depositing a layer of gate material over the first portion of the gate;
creating a mask over the layer of gate material such that a portion of the gate material is exposed; and
removing the exposed portion of the gate material.
12. The method of claim 1 , wherein the layer of suicide is cobalt silicide.
13. The method of claim 1 , wherein the gate is essentially T-shaped in cross-section.
14. A method for making a silicided gate, comprising:
providing a first portion of a gate;
creating a mask over the first portion of the gate, the mask having an opening defined therein;
epitaxially growing a second portion of the gate in the opening; and
forming a layer of suicide on the second portion of the gate;
wherein the first portion of the gate has a width w 1 and the second portion of the gate has a width w 2 as taken along a plane perpendicular to the length of the gate, and wherein w 2 >w 1 and; wherein w 1 <50 nm; and wherein w 2 >50 nm.
15. The method of claim 14 , wherein the gate is essentially T-shaped in cross-section.
16. The method of claim 14 , wherein the layer of suicide is cobalt silicide.