System and method for forming moveable features on a composite substrate
View Patent ↗A method for forming moveable features suspended over a substrate is described, wherein a cavity beneath the moveable feature is first formed using a liquid etchant applied through one or more release holes. After formation of the cavity, the outline of the moveable feature is formed using a dry etch process. Since the moveable feature is free to move upon its formation using the dry etch process, no stiction issues arise using the systems and methods described here.
1. A method for forming a moveable feature on a composite wafer including a device layer, a sacrificial layer and a handle layer, comprising:
forming at least one release hole in the device layer of the composite wafer;
forming at least one cavity in a sacrificial layer of the composite wafer, in an area beneath the release hole;
forming at least one metal structure on the device layer; and
forming the moveable feature, wherein the moveable feature includes the release hole, and wherein the moveable feature is formed by removing a portion of the device layer of the composite wafer, over the area of the at least one cavity, and wherein the movable feature is formed after the at least one cavity, the at least one metal structure and at least one release hole are formed.
2. The method of claim 1 , wherein forming the at least one release hole comprises forming the at least one release hole using reactive ion etching.
3. The method of claim 1 , wherein forming the at least one release hole includes forming at least two release holes so positioned that the corresponding cavities have overlapping outer boundaries, and form a single cavity with a corrugated outline.
4. The method of claim 1 , wherein forming the at least one cavity comprises forming the at least one cavity by applying a liquid acid to the sacrificial layer of the composite wafer through the release holes formed in the device layer of the composite wafer.
5. The method of claim 4 , wherein the movable feature comprises a membrane attached to the device layer in at least two places.
6. The method of claim 1 ,
wherein forming the moveable feature comprises forming the moveable feature using deep reactive ion etching on the device layer of the composite wafer, and wherein the movable feature is formed after the at least one release hole is formed.
7. The method of claim 1 , wherein the device layer of the composite substrate comprises at least one of single crystal silicon, amorphous silicon, polycrystalline silicon, silicon dioxide, silicon nitride, metal oxide and titanium, and the sacrificial layer of the composite substrate comprises at least one of a metal, metal oxide, silicon, silicon dioxide and a polymer, and the handle layer of the composite substrate comprises at least one of silicon, sapphire, alumina, glass, gallium arsenide and a ceramic.
8. The method of claim 1 , wherein the at least one metal structure is an electrical contact and is insulated from the device layer by an insulating layer of silicon dioxide, and wherein the at least one electrical contact and the insulating layer are formed before the movable member is formed, and are formed on a side of the device layer opposite a side facing the handle layer.
9. The method of claim 8 , wherein the electrical contact comprises a multilayer of chromium, molybdenum and gold.
10. An apparatus for forming a moveable feature on a composite substrate including a device layer, a sacrificial layer and a handle layer, comprising:
means for forming at least one release hole in the device layer of the composite wafer;
means for forming at least one cavity in a sacrificial layer of the composite wafer, in an area beneath the release hole;
means for forming at least one metal structure on the device layer; and
means for forming the moveable feature after formation of the at least one release hole and at least one cavity, wherein the moveable feature includes the release hole, and wherein the moveable feature is formed by removing a portion of the device layer of the composite wafer, over the area of the at least one cavity and wherein the movable feature is formed after the at least one cavity, the at least one metal structure and at least one release hole are formed.