IP Library Granted Patent US 7,334,460
Granted Patent B2
US 7,334,460 · App. 11/382,438 · Granted Feb 26, 2008

Method and apparatus of manipulating a sample

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Quick Facts
Patent No.
US 7,334,460
App. No.
11/382,438
Granted
Feb 26, 2008
Kind
B2
Abstract

A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.

Claims (52)

1. A method for interacting with a surface of a sample comprising:

scanning the surface of the sample with a probe;

removing the probe from the surface of the sample;

turning off a feedback of the probe;

storing a change in deflection between a deflection setpoint and a free air deflection; and

turning on the feedback of the probe.

2. The method according to claim 1 , further comprising manipulating the surface with the probe.

3. The method according to claim 1 , further comprising switching between amplitude mode and contact mode by:

turning off the feedback of the probe;

setting a deflection setpoint based on a free air deflection combined with the change in deflection; and

turning on the feedback of the probe.

4. The method according to claim 1 , wherein the probe comprises:

a cantilever;

a first tip mounted on the cantilever; and

a second tip mounted on the cantilever, the first and the second tips being configured to combine to form an imaging tip.

5. The method according to claim 4 , further comprising applying a voltage across the first tip and the second tip to combine the first tip and the second tip to form an imaging tip.

6. A method for interacting with a surface of a sample comprising:

scanning the surface of the sample with a probe;

removing the probe from the surface of the sample;

turning off a feedback of the probe;

storing a change in amplitude between an amplitude setpoint and a free air amplitude; and

turning on the feedback of the probe.

7. The method according to claim 6 , further comprising switching between contact mode and amplitude mode by:

turning off the feedback of the probe;

setting an amplitude setpoint based on a free air amplitude combined with a change in amplitude;

changing the input to the feedback from deflection to amplitude; and

turning on the feedback of the probe.

8. The method according to claim 6 , further comprising manipulating the surface with the probe.

9. The method according to claim 6 , wherein the probe comprises:

a cantilever;

a first tip mounted on the cantilever; and

a second tip mounted on the cantilever, the first and the second tips being configured to combine to form an imaging tip.

10. The method according to claim 9 , further comprising applying a voltage across the first tip and the second tip to combine the first tip and the second tip to form an imaging tip.

11. The method for interacting with a surface of a sample according to claim 6 , wherein the scanning the surface of the sample step includes a) scanning the sample to create a first image and b) scanning the sample to create a second image, the method further comprising:

determining a relative position of the probe by comparing the first image to the second image; and

manipulating the surface of the sample with the probe.

12. A method for interacting with a surface of a sample comprising:

scanning the surface of the sample with a probe operating at a first deflection setpoint;

removing the probe from the surface of the sample;

turning off a feedback used to maintain probe operation at the first deflection setpoint; and

storing a change in deflection between the first deflection setpoint and a first free air deflection.

13. A method for interacting with a surface of a sample, comprising:

scanning the surface of the sample with a probe to create a first image;

scanning the surface of the sample with a probe to create a second image;

determining a relative position of the probe by comparing the first image to the second image; and

manipulating the surface of the sample with the probe.

14. The method for interacting with a surface of a sample according to claim 13 , further comprising adjusting a position of the probe based on a result obtained from a determining step.

15. The method for interacting with a surface of a sample according to claim 13 , wherein the probe comprises:

a cantilever;

a first tip mounted on the cantilever; and

a second tip mounted on the cantilever, the first and the second tips being configured to combine to form an imaging tip.

16. The method for interacting with a surface of a sample according to claim 15 , further comprising applying a voltage across the first tip and the second tip to combine the first tip and the second tip to form an imaging tip.

Assignments (2)
CHANGE OF NAME Recorded Oct 24, 2011
From: VEECO METROLOGY INC.
To: BRUKER NANO, INC.
Reel/Frame 027111/0461 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 28, 2010
From: VEECO INSTRUMENTS INC.
To: VEECO METROLOGY INC.
Reel/Frame 025051/0290 →