Patent Assignment
Reel/Frame 025051/0290
Assignment of Assignor's Interest
Recorded: 2010-09-28
Pages: 17
Assignor
VEECO INSTRUMENTS INC.
Executed: 2010-09-28
Assignee
VEECO METROLOGY INC.
112 ROBIN HILL ROAD, SANTA BARBARA, CALIFORNIA, 93117
Covered Properties
(155)
Jumping Probe Microscope
Patent:
5,229,606 →
Application:
07/361,545 →
A Scanning Probe Microscope Employing Adjustable Tilt and a Unitary Head
Patent:
5,103,095 →
Application:
07/527,559 →
Drift Compensation for Scanning Probe Microscopes Using an Enhanced Probe Positioning System
Patent:
5,077,473 →
Application:
07/558,225 →
Method of Operating a Scanning Probe Microscope to Improve Drift Characteristics
Patent:
5,081,390 →
Application:
07/565,713 →
Atomic Force Microscope
Patent:
5,237,859 →
Application:
07/707,292 →
Scanner for Scanning Probe Microscopes Having Reduced Z-Axis Non-Linearity
Patent:
5,198,715 →
Application:
07/793,245 →
Atomic Force Microscope
Patent:
5,224,376 →
Application:
07/831,876 →
Method of Adjusting the Size of the Area Scanned by a Scanning Probe
Patent:
5,204,531 →
Application:
07/835,577 →
Atomic Force Microscope for Small Samples Having Dual-Mode Operating Capability
Patent:
5,253,516 →
Application:
07/883,043 →
A Tapping Atomic Force Microscope
Patent:
5,412,980 →
Application:
07/926,175 →
Positioning Device for Scanning Probe Microscopes
Patent:
5,306,919 →
Application:
07/947,831 →
Stiffness Enhancer for Movable Stage Assembly
Patent:
5,314,254 →
Application:
07/970,875 →
Methods of Operating Atomic Force Microscopes to Measure Friction
Patent:
5,400,647 →
Application:
07/974,603 →
An Improved Scanning Probe Microscope Using Stored Data for Vertical Probe Positioning
Patent:
5,308,974 →
Application:
07/982,871 →
Jumping Probe Microscope
Patent:
5,266,801 →
Application:
08/009,076 →
Atomic Force Microscope
Patent:
5,329,808 →
Application:
08/085,053 →
Scanning Stylus Atomic Force Microscope with Cantilever Tracking and Optical Access
Patent:
5,463,897 →
Application:
08/107,017 →
Jumping Probe Microscope
Patent:
5,415,027 →
Application:
08/147,571 →
Scanning Probe Microscope Using Stored Data for Vertical Probe Positioning
Patent:
5,418,363 →
Application:
08/202,287 →
Suspension Assembly Static Attitude and Distance Measuring Instrument
Patent:
5,636,013 →
Application:
08/368,547 →
Tapping Atomic Force Microscope with Phase or Frequency Detection
Patent:
5,519,212 →
Application:
08/381,159 →
Scanning Stylus Atomic Force Microscope with Cantilever Tracking and Optical Access
Patent:
5,560,244 →
Application:
08/416,100 →
Scanning Probe Microscope Having a Single Viewing Device for on-Axis and Oblique Optical Views
Patent:
5,877,891 →
Application:
08/428,358 →
Methods of Operating Atomic Force Microscopes to Measure Friction
Patent:
5,553,487 →
Application:
08/502,368 →
High Resolution Fiber Optic Probe for Near Field Optical Microscopy and Method of Making Same
Patent:
5,664,036 →
Application:
08/542,437 →
All-Fiber, High-Sensitivity, Near-Field Optical Microscopy Instrument Employing Guided Wave Light Collector and Specimen Support
Patent:
5,796,909 →
Application:
08/601,600 →
Scanning Stylus Atomic Force Microscope with Cantilever Tracking and Optical Access
Patent:
5,714,682 →
Application:
08/679,332 →
Atomic Force Microscope for Measuring Properties of Dielectric and Insulating Layers
Patent:
5,874,734 →
Application:
08/777,655 →
Method and Apparatus for Measuring Mechanical Properties on a Small Scale
Patent:
5,866,807 →
Application:
08/794,379 →
Method and Apparatus for Measuring Energy Dissipation by a Probe During Operation of an Atomic Force Microscope
Patent:
6,038,916 →
Application:
08/898,469 →
Method and Apparatus for Obtaining Improved Vertical Metrology Measurements
Patent:
5,898,106 →
Application:
08/937,494 →
Folded Low-Power Interference Microscope Objective
Patent:
5,907,400 →
Application:
08/946,303 →
Scan Control for Scanning Probe Microscopes
Patent:
37,560 →
Application:
08/948,909 →
Method for Improving the Operation of Oscillating Mode Atomic Force Microscopes
Patent:
6,008,489 →
Application:
08/984,058 →
Selection Process for Sequentially Combining Multiple Sets of Overlapping Surface-Profile Interferometric Data to Produce a Continuous Composite Map
Patent:
5,991,461 →
Application:
08/992,310 →
Tapping Atomic Force Microscope with Phase or Frequency Detection
Patent:
36,488 →
Application:
09/082,320 →
Scanning Stylus Atomic Force Microscope with Cantilever Tracking and Optical Access
Patent:
6,032,518 →
Application:
09/119,549 →
System for Eliminating Scattered Light in Autocollimator for Magnetic-Head Suspension Measuring Instrument
Patent:
5,929,987 →
Application:
09/121,765 →
Method and Apparatus for Dna Sequencing Using a Local Sensitive Force Detector
Patent:
6,280,939 →
Application:
09/145,352 →
Afm with Referenced or Differential Height Measurement
Patent:
6,196,061 →
Application:
09/186,742 →
Method and Apparatus for the Quantitative and Objective Correlation of Data from a Local Sensitive Force Detector
Patent:
6,357,285 →
Application:
09/188,497 →
Method and Apparatus for a Line Based, Two-Dimensional Characterization of a Three-Dimensional Surface
Patent:
6,427,345 →
Application:
09/189,443 →
Method and Apparatus for Cleaning a Tip of a Probe of a Probe-Based Measuring Instrument
Patent:
6,353,221 →
Application:
09/240,713 →
Active Probe for an Atomic Force Microscope and Method of Use Thereof
Patent:
6,189,374 →
Application:
09/280,160 →
Disk-Mount Device for Automatic Successive Testing of Computer-Drive Disk Blanks by Interferometry
Patent:
6,188,485 →
Application:
09/291,521 →
Method and System for Increasing the Accuracy of a Probe-Based Instrument Measuring a Heated Sample
Patent:
6,185,992 →
Application:
09/354,448 →
Flexure Assembly for a Scanner
Patent:
6,246,052 →
Application:
09/398,698 →
High Bandwidth Recoiless Microactuator
Patent:
6,323,483 →
Application:
09/399,388 →
Embedded Interferometer for Reference-Mirror Calibration of Interferometric Microscope
Patent:
6,545,761 →
Application:
09/452,334 →
Active Probe for an Atomic Force Microscope and Method of Use Thereof
Patent:
6,530,266 →
Application:
09/476,163 →
Method and Apparatus for Atomic Force Microscopy
Patent:
6,642,517 →
Application:
09/491,000 →
Automated Minimization of Optical Path Difference and Reference Mirror Focus in White-Light Interference Microscope Objective
Patent:
6,552,806 →
Application:
09/497,567 →
Pulsed Source Scanning Interferometer
Patent:
6,556,305 →
Application:
09/505,500 →
Lateral-Scanning Interferometric with Tilted Optical Axis
Patent:
6,449,048 →
Application:
09/569,131 →
Alignment of Magnetic Heads for Automatic Identification of Regions of Interest for Interferometric Measurement
Patent:
6,459,489 →
Application:
09/585,370 →
Self-centering crash protection mechanism for interference microscope objective
Patent:
6,266,183 →
Application:
09/664,141 →
Reduced Noise Sensitivity Method and Apparatus for Converting an Interferogram Phase Map to a Surface Profile Map
Patent:
6,738,511 →
Application:
09/679,277 →
AFM with referenced or differential height measurement
Patent:
6,279,389 →
Application:
09/698,919 →
Method and System for Increasing the Accuracy of a Probe-Based Instrument Measuring a Heated Sample
Method and apparatus for high resolution profiling in semiconductor structures
Patent:
6,287,880 →
Application:
09/751,728 →
Method and Apparatus for Reducing the Parachuting of a Probe
Balanced Momentum Probe Holder
Apparatus and Method for Isolating and Measuring Movement in Metrology Apparatus
Flexure Assembly for a Scanner
Bat-Wing Attenuation in White-Light Interferometry
Apparatus and Method for Isolating and Measuring Movement in a Metrology Apparatus
Method of Characterizing a Semiconductor Surface
Correction of Scanning Errors in Interferometric Profiling
Patent:
6,624,893 →
Application:
09/875,638 →
Scanning Interferometry with Reference Signal
Method and Apparatus for Manipulating a Sample
Dynamic Activation for an Atomic Force Microscope and Method of Use Thereof
Force Scanning Probe Microscope
Manual Control with Force-Feedback for Probe Microscopy-Based Force Spectroscopy
Patent:
7,013,717 →
Application:
10/006,090 →
Apparatus and Method to Compensate for Stress in a Microcantilever
Patent:
6,941,823 →
Application:
10/045,438 →
Scanning Electrochemical Potential Microscope
Patent:
7,156,965 →
Application:
10/052,921 →
Vertical Probe Card for Attachment Within a Central Corridor of a Magnetic Field Generator
Reference Signal for Stitching of Interferometric Profiles
Patent:
6,987,570 →
Application:
10/109,361 →
Image Reconstruction Method
Patent:
6,810,354 →
Application:
10/139,949 →
Flexure Assembly for a Scanner
Torsional Resonance Mode Probe-Based Instrument and Method
Patent:
6,945,099 →
Application:
10/189,108 →
Alignment and Correction Template for Optical Profilometric Measurement
Environmental Scanning Probe Microscope
Active Probe for an Atomic Force Microscope and Method of Use Thereof
Method of Fabricating a Surface Probing Device and Probing Device Produced Thereby
Apparatus and Method for Improving Tuning of a Probe-Based Instrument
Microscope with Fixed-Element Autocollimator for Tilt Adjustment
Scanning Thermal Probe Microscope
Patent:
7,448,798 →
Application:
10/464,379 →
Balanced Momentum Probe Holder
Apparatus and Method for Isolating and Measuring Movement in a Metrology Apparatus
System for Wide Frequency Dynamic Nanomechanical Analysis
Dynamic Activation for an Atomic Force Microscope and Method of Use Thereof
Force Scanning Probe Microscope
Measurement of Object Deformation with Optical Profiler
Flexure Assembly for a Scanner
Methods of Fabricating Structures for Characterizing Tip Shape of Scanning Probe Microscope Probes and Structures Fabricated Thereby
Film Thickness and Boundary Characterization by Interferometric Profilometry
Probes for Use in Scanning Probe Microscopes and Methods of Fabricating Such Probes
Method and Apparatus of Driving Torsional Resonance Mode of a Probe-Based Instrument
Image Reconstruction Method
Active Probe for an Atomic Force Microscope and Method for Use Thereof
Profilometry Through Dispersive Medium Using Collimated Light with Compensating Optics
Capacitance Probe for Thin Dielectric Film Characterization
Patent:
7,001,785 →
Application:
11/006,478 →
Mounting Mechanism for Compensating Optics in Interferometer
Balanced Momentum Probe Holder
Method and Apparatus for Manipulating a Sample
Method and Apparatus for Obtaining Quantitative Measurements Using a Probe Based Instrument
Method of Fabricating a Surface Probing Device
Method and Apparatus for Rapid Automatic Engagement of a Probe
Method and Apparatus for Measuring Electrical Properties in Torsional Resonance Mode
Tracking Qualification and Self-Optimizing Probe Microscope and Method
Method and Apparatus for Measuring a Characteristic of a Sample Feature
Scanning Probe Microscopy Method and Apparatus Utilizing Sample Pitch
Measurement of Thin Films Using Fourier Amplitude
Flexure Assembly for a Scanner
Capacitance Probe for Thin Dielectric Film Characterization
Method and Apparatus for Reducing Lateral Interactive Forces During Operation of a Probe-Based Instrument
Method and Apparatus of Manipulating a Sample
Method of Making a Force Curve Measurement on a Sample
Optical Detection Alignment/Tracking Method and Apparatus
Dynamic Activation for an Atomic Force Microscope and Method of Use Thereof
Apparatus and Method of Transporting and Loading Probe Devices of a Metrology Instrument
Application:
11/426,461 →
Publication:
US 2008/0006083
Method and Apparatus for Monitoring Movement of a Spm Actuator
System for Wide Frequency Dynamic Nanomechanical Analysis
Apparatus and Method of Amplifying Low Voltage Signals
Thermal Mechanical Drive Actuator, Thermal Probe and Method of Thermally Driving a Probe
Methods of Fabricating Structures for Characterizing Tip Shape of Scanning Probe Microscope Probes and Structures Fabricated Thereby
High-Definition Vertical-Scan Interferometry
Patent:
7,605,925 →
Application:
11/473,447 →
Cantilever Free-Decay Measurement System with Coherent Averaging
Method and Apparatus of High Speed Property Mapping
Method and Apparatus of Scanning a Sample Using a Scanning Probe Microscope
Image Reconstruction Method
Method and Apparatus for Obtaining Material Property Information of a Heterogeneous Sample Using Harmonic Resonance Imaging
Method and Apparatus of Driving Torsional Resonance Mode of a Probe-Based Instrument
Fast-Scanning Spm Scanner and Method of Operating Same
Variable-Wavelength Illumination System for Interferometry
Closed Loop Controller and Method for Fast Scanning Probe Microscopy
Interferometric Measurement of Non-Homogeneous Multi-Material Surfaces
Interferometric Iterative Technique with Bandwidth and Numerical-Aperture Dependency
High-Bandwidth Actuator Drive for Scanning Probe Microscopy
Fast-Scanning Spm and Method of Operating Same
Probe Device for a Metrology Instrument and Method of Fabricating the Same
Interferometric Measurement of Dlc Layer on Magnetic Head
Apparatus and Method of Transporting and Loading Probe Devices of a Metrology Instrument
Real-Time Scanner-Nonlinearity Error Correction for Hdvsi
Patent:
7,898,672 →
Application:
12/082,846 →
Non-Destructive Wafer-Scale Sub-Surface Ultrasonic Microscopy Employing Near Field Afm Detection
Probe for a Scanning Probe Microscope and Method of Manufacture
Method and Apparatus of Automatic Scanning Probe Imaging
Polarization Mirau Interference Microscope
Patent:
8,072,610 →
Application:
12/217,015 →
Method of Fabricating a Probe Device for a Metrology Instrument and a Probe Device Produced Thereby
In-Phase/In-Quadrature Demodulator for Spectral Information of Interference Signal
Patent:
7,864,327 →
Application:
12/351,639 →
Method and Apparatus for Obtaining Quantitative Measurements Using a Probe Based Instrument
Probe Microscope Setup Method
Method and Apparatus of Operating a Scanning Probe Microscope
Large-Surface Defect Detection by Single-Frame Spatial-Carrier Interferometry
Patent:
8,275,573 →
Application:
12/624,284 →
Real-Time Effective-Wavelength Error Correction for Hdvsi
Patent:
7,956,630 →
Application:
12/766,744 →
Related Assignments
(7)
Other recorded transfers of the patents in this record — the chain of ownership.
Merger
Sep 5, 2006
From: TM MICROSCOPES CORP.
To: VEECO METROLOGY, LLC
Reel/Frame 018194/0788 →
Change of Name
Sep 5, 2006
From: THERMOMICROSCOPES CORP.
To: TM MICROSCOPES CORP.
Reel/Frame 018224/0100 →
Merger
Sep 5, 2006
From: VEECO METROLOGY, LLC
To: VEECO METROLOGY INC.
Reel/Frame 018194/0803 →
Release of Security Interest
Jul 15, 2010
From: SILICON VALLEY BANK
To: VEECO INSTRUMENTS INC.
Reel/Frame 024686/0135 →
Merger
Sep 1, 2010
From: DIGITAL INSTRUMENTS, INC.
To: VEECO INSTRUMENTS INC.
Reel/Frame 024944/0020 →
Change of Name
Oct 24, 2011
From: VEECO METROLOGY INC.
To: BRUKER NANO, INC.
Reel/Frame 027111/0461 →
Change of Name
Jun 11, 2012
From: VEECO METROLOGY INC.
To: BRUKER NANO, INC.
Reel/Frame 028350/0511 →