Method and apparatus for obtaining material property information of a heterogeneous sample using harmonic resonance imaging
View Patent ↗A method and apparatus for its practice are provided of differentiating at least one component of a heterogeneous sample from other component(s) using harmonic resonance imaging and of obtaining information regarding the sample from the differentiation. In a preferred embodiment, an image is created of a property of a harmonic or a combination of a harmonics producing a response having a contrast factor between the sample's constituent components. The desired harmonic(s) can be identified either in a preliminary data acquisition procedure on the sample or, if the sample's constituent components are known in advance, predetermined. The desired harnonic(s) may be identified directly by the user or automatically through, e.g., pattern recognition. A compositional map may then be generated and displayed and/or additional information about the sample may be obtained.
1. A method comprising:
a. providing a scanning probe microscope (SPM), the SPM including a probe having a cantilever bearing a tip;
b. oscillating the cantilever of the probe such that the probe intermittently interacts with a heterogeneous sample;
c. measuring torsional motion of the cantilever resulting from the interaction;
d. differentiating materials of the sample based on harmonics of the measured torsional motion; and
wherein the differentiating step comprises comparing the measured torsional motion at two or more harmonics to identify at least one harmonic that has a response that provides contrast among the materials, and wherein at each harmonic the harmonic components of the torsional motion are used to reconstruct the interaction between the probe and the sample at that harmonic.
2. The method of claim 1 , wherein the differentiating step comprises identifying one or more harmonics that produces a response having the greatest contrast between the materials.
3. The method of claim 1 , wherein the identifying step utilizes at least one of manual inspection of harmonic data, and pattern recognition.
4. The method of claim 3 , wherein the identifying step utilizes at least one of full or partial spectral principal component analysis and artificial neural networks.
5. The method of claim 1 , wherein the differentiating step includes constructing a combination of harmonics that produce responses having a contrast among the materials.
6. The method of claim 1 further comprising the step of color coding an SPM image of the sample as a result of the differentiating step.
7. The method of claim 6 , further comprising the step of identifying mechanical interfaces from the color coding step.
8. The method of claim 1 , further comprising, based on the measurement, mapping a property of the sample over an area of the sample surface.
9. The method of claim 1 , further comprising, based on the measurement, obtaining component area fraction information of at least one component of the sample.
10. The method of claim 9 , wherein the interface region information comprises at least one of elasticity information, information concerning adhesiveness, and information concerning the ability of the sample to dissipate energy.
11. The method of claim 1 , further comprising, based on the measurement, obtaining particle size information of at least one component of the sample.
12. The method of claim 11 , wherein the particle size information comprises at least one of particle size distribution, particle volume, and particle aspect ratio.
13. The method of claim 1 , further comprising obtaining interface region information about the sample.
14. A method of mapping material properties of a heterogeneous sample, comprising:
a. providing a scanning probe microscope (SPM), the SPM including a torsional probe having a cantilever bearing a tip, the tip being offset from a longitudinal centerline of the cantilever;
b. oscillating the cantilever of the probe in flexure while the probe interacts with a sample;
c. measuring torsional deflection of the cantilever during the interaction;
d. differentiating materials of the sample based on a selected harmonic or combination of harmonics of the measured torsional motion, and wherein at each harmonic the harmonic components of the torsional motion are used to reconstruct the interaction between the probe and the sample at that harmonic; and
e. mapping a property of the sample over an area of the sample surface.
15. The method of claim 14 , wherein the differentiating step utilizes at least one of data correlation, manual inspection of harmonic data, and pattern recognition.
16. The method of claim 14 , wherein the differentiating step utilizes at least one of full or partial spectral principal component analysis and artificial neural network.
17. The method of claim 14 , further comprising, based on the measured torsional motion, obtaining component area fraction information of at least one component of the sample.
18. The method of claim 14 , further comprising, based on the measured torsional motion, obtaining particle size information of at least one component of the sample.
19. The method of claim 14 , wherein the particle size information comprises at least one of particle size distribution, particle volume, and particle aspect ratio.
20. The method of claim 14 , further comprising obtaining interface region information about the sample, wherein the interface region information comprises at least one of elasticity information, information concerning adhesiveness, and information concerning the ability of the sample to dissipate energy.
21. A scanning probe microscope (SPM) comprising:
a. a probe having a cantilever bearing a tip;
b. a drive that drives the probe to oscillate;
c. a detector that measures motion of the probe; and
d. a controller that interacts with the drive and the detector, the controller being operable to
i. cause the drive to oscillate the cantilever of the probe while the probe interacts with a heterogeneous sample,
ii. using data from the detector, measure torsional deflection of the cantilever during the interaction, and
iii. differentiate materials of the sample based on harmonics of the measured torsional motion, and wherein at each harmonic the harmonic components of the torsional motion are used to reconstruct the interaction between the probe and the sample at that harmonic; and
wherein the controller differentiates materials using harmonics identified as producing responses having a contrast among the materials.
22. The SPM of claim 21 , wherein the controller is further operable, based on the measurement, to map a property of the sample over an area of the sample surface.
23. The SPM of claim 21 , wherein the controller is further operable, based on the measurement, to obtain component area fraction information of at least one component of the sample based.
24. The SPM of claim 21 , wherein the controller is further operable, based on the measurement, to obtain particle size information of at least one component of the sample.
25. The SPM of claim 21 , wherein the controller is further operable, based on the measurement, to obtain interface region information about the sample.
26. A method comprising:
a. providing a scanning probe microscope (SPM), the SPM including a probe having a cantilever bearing a tip;
b. oscillating the cantilever of the probe such that the probe intermittently interacts with a heterogeneous sample;
c. measuring torsional motion of the cantilever resulting from the interaction;
d. differentiating materials of the sample based on harmonics of the measured torsional motion; and
e. mapping, based on the measurement, a property of the sample over an area of the sample surface; and
wherein the differentiating step comprises comparing the measured torsional motion at two or more harmonics to identify at least one harmonic that has a response that provides contrast among the materials.
27. A method comprising:
a. providing a scanning probe microscope (SPM), the SPM including a probe having a cantilever bearing a tip;
b. oscillating the cantilever of the probe such that the probe interacts with a heterogeneous sample;
c. measuring torsional motion of the cantilever resulting from the interaction;
d. differentiating materials of the sample based on harmonics of the measured torsional motion;
e. obtaining, based on the measurement, component area fraction information of at least one component of the sample; and
wherein the differentiating step comprises comparing the measured torsional motion at two or more harmonics to identify at least one harmonic that has a response that provides contrast among the materials.
28. A method comprising:
a. providing a scanning probe microscope (SPM), the SPM including a probe having a cantilever bearing a tip;
b. oscillating the cantilever of the probe such that the probe interacts with a heterogeneous sample;
c. measuring torsional motion of the cantilever resulting from the interaction;
d. differentiating materials of the sample based on harmonics of the measured torsional motion;
e. obtaining, based on the measurement, particle size information of at least one component of the sample; and
wherein the differentiating step comprises comparing the measured torsional motion at two or more harmonics to identify at least one harmonic that has a response that provides contrast among the materials.
29. A method comprising:
a. providing a scanning probe microscope (SPM), the SPM including a probe having a cantilever bearing a tip;
b. oscillating the cantilever of the probe such that the probe interacts with a heterogeneous sample;
c. measuring torsional motion of the cantilever resulting from the interaction;
d. differentiating materials of the sample based on harmonics of the measured torsional motion, wherein the differentiating step comprises comparing the measured torsional motion at two or more harmonics to identify at least one harmonic that has a response that provides contrast among the materials, and wherein at each harmonic the harmonic components of the torsional motion are used to reconstruct the interaction between the probe and the sample at that harmonic; and
e. obtaining interface region information about the sample.