Imprint lithography substrate processing tool for modulating shapes of substrates
View Patent ↗The present invention is directed to a chucking system to modulate substrates so as to properly shape and position the same with respect to a wafer upon which a pattern is to be formed with the substrate. The chucking system includes a chuck body having first and second opposed sides. A side surface extends therebetween. The first side includes first and second spaced-apart recesses defining first and second spaced-apart support regions. The first support region cinctures the second support region and the first and second recesses. The second support region cinctures the second recess, with a portion of the body in superimposition with the second recess being transparent to radiation having a predetermined wavelength. The second side and the side surface define exterior surfaces. The body includes throughways placing the first and second recesses in fluid communication with one of the exterior surfaces.
1. An imprint lithography substrate processing tool comprising:
a substrate support having a substrate receiving surface adapted to support a substrate having an imprintable material formed thereon during a substrate processing operation;
a chucking system to hold a template having a predetermined pattern formed on a portion of the template, the chucking system comprising: (i) a chuck body having first and second opposing sides, the first side being in an opposing relationship to the substrate receiving surface of the substrate support and the first side including a centrally located cavity, a first template support surface surrounding the cavity, a second template support surface surrounding the first template support surface and a recess formed between the first and second template support surfaces; and (ii) a first fluid channel extending through the chuck body to the recess;
a pressure control system operatively coupled to apply a vacuum pressure in the recess through the first fluid channel to secure the template to the chucking system; and
a source of radiation configured to generate radiation having a predetermined wavelength, the source of radiation and substrate support positioned on opposite sides of the chuck body such that radiation generated by the source is transmitted through the cavity.
2. The imprint lithography substrate processing tool set forth in claim 1 wherein the chucking system further comprises a window comprising material transparent to radiation having the predetermined wavelength, the window positioned to at least partially cover the centrally located cavity.
3. The imprint lithography substrate processing tool set forth in claim 2 wherein the chucking system further comprises a second fluid channel coupling the centrally located cavity to the pressure control system and wherein the pressure control system is further operatively coupled to apply a positive fluid pressure to the cavity.
4. The imprint lithography substrate processing tool set forth in claim 3 further comprising a z-axis controller operatively coupled to move at least one of the substrate support or chucking system along the z-axis so that a template secured to the chucking system and having a mold pattern formed thereon can contact a substrate positioned on the substrate support and having an imprintable material formed thereon to imprint the mold pattern into the imprintable material.
5. The imprint lithography substrate processing tool set forth in claim 2 wherein the source of radiation comprises an ultraviolet radiation source and wherein the window is transparent to ultraviolet radiation.
6. The imprint lithography substrate processing tool set forth in claim 1 further comprising an imprint template having first and second opposing sides and a mold pattern formed on a centrally located portion of the first side, wherein the template is secured to the chucking system via vacuum pressure applied to the recess such that an outer peripheral portion of the second side of the template contacts the first and second template support surfaces and mold pattern is formed entirely in an area of the template that is opposed to the cavity.
7. The imprint lithography substrate processing tool set forth in claim 6 wherein the substrate support is configured to hold a semiconductor wafer and the substrate receiving surface is substantially round to accommodate the semiconductor wafer.
8. The imprint lithography substrate processing tool set forth in claim 6 wherein the first template support surface has a shape that is selected from a set of shapes consisting of annular, polygonal and circular.
9. The imprint lithography substrate processing tool set forth in claim 1 wherein the chucking system further comprises a wall disposed within the recess extending between the first and second template support surfaces to segment the recess into a plurality of sub-chambers and wherein each sub-chamber in the recess is fluidly coupled to the pressure control system by a separate fluid channel.
10. The imprint lithography substrate processing tool set forth in claim 1 wherein the chucking system further comprises a bladder operatively coupled to apply a compressive force to an outer peripheral edge of the chucking system.
11. The imprint lithography substrate processing tool set forth in claim 1 further comprising a z-axis controller operatively coupled to move at least one of the substrate support or chucking system along the z-axis so that a template secured to the chucking system and having a mold pattern formed thereon can contact a substrate positioned on the substrate support and having an imprintable material formed thereon to imprint the mold pattern into the unprintable material.
12. A chucking system to hold a body, the chucking system comprising:
a chuck body having first and second opposing sides, including a centrally located cavity, a first body support surface surrounding the cavity, a second body support surface surrounding the first body support surface and a recess formed between the first and second body support surfaces, and a window comprising a material transparent to radiation having a predetermined wavelength, the window positioned to at least partially cover the centrally located cavity;
a first fluid channel extending through the chuck body to the recess;
a pressure control system operatively coupled to apply a vacuun pressure in the recess through the first fluid channel to secure the body to the chucking system; and
a source of radiation configured to generate radiation having a predetermined wavelength, with the radiation being transmitted through the cavity.
13. The imprint lithography substrate processing tool set forth in claim 12 wherein said body may be selected from a group of bodies consisting of a substrate and a template.
14. The imprint lithography substrate processing tool set forth in claim 12 wherein the first body support surface has a shape that is selected from a set of shapes consisting of annular, polygonal and circular.
15. The imprint lithography substrate processing tool set forth in claim 12 wherein the chucking system further comprises a second fluid channel coupling the centrally located cavity to the pressure control system and wherein the pressure control system is further operatively coupled to apply a positive fluid pressure to the cavity.
16. The imprint lithography substrate processing tool set forth in claim 15 wherein the first body support surface has a shape that is selected from a set of shapes consisting of annular, polygonal and circular.
17. The imprint lithography substrate processing tool set forth in claim 12 wherein the chucking system further comprises a wall disposed within the recess extending between the first and second body support surfaces to segment the recess into a plurality of sub-chambers and wherein each sub-chamber in the recess is fluidly coupled to the pressure control system by a separate fluid channel.
18. The imprint lithography substrate processing tool set forth in claim 12 wherein the chucking system further comprises a bladder operatively coupled to apply a compressive force to an outer peripheral edge of the chucking system.
19. An imprint lithography substrate processing tool comprising:
a substrate support having a substrate receiving surface adapted to support a substrate having an imprintable material formed thereon during a substrate processing operation;
a chucking system to hold a template having a predetermined pattern formed on a portion of the template, the chucking system comprising: (i) a chuck body having first and second opposing sides, the first side being in an opposing relationship to the substrate receiving surface of the substrate support and the first side including a centrally located cavity, a first template support surface surrounding the cavity, a second template support surface surrounding the first template support surface and a recess formed between the first and second template support surfaces; (ii) a window comprising material transparent to radiation having a predetermined wavelength, the window positioned to at least partially cover the centrally located cavity and (iii) a first fluid channel extending through the chuck body to the recess;
a pressure control system operatively coupled to apply a vacuum pressure in the recess through the first fluid channel to secure the template to the chucking system; and
a source of radiation configured to generate radiation having the predetermined wavelength, the source of radiation and substrate support positioned on opposite sides of the chuck body such that radiation generated by the source is transmitted through the window prior to reaching the substrate on the substrate support system.
20. The imprint lithography substrate processing tool set forth in claim 19 wherein the chucking system further comprises a second fluid channel coupling the centrally located cavity to the pressure control system and wherein the pressure control system is further operatively coupled to apply a positive fluid pressure to the cavity.
21. The imprint lithography substrate processing tool set forth in claim 19 wherein the source of radiation comprises an ultraviolet radiation source and wherein the window is transparent to ultraviolet radiation.
22. The imprint lithography substrate processing tool set forth in claim 19 further comprising an imprint template having first and second opposing sides and a mold pattern formed on a centrally located portion of the first side, wherein the template is secured to the chucking system via vacuum pressure applied to the recess such that an outer peripheral portion of the second side of the template contacts the first and second template support surfaces and mold pattern is formed entirely in an area of the template that is opposed to the cavity.