Radial-biased polishing pad
View Patent ↗The polishing pad is useful for polishing magnetic, optical and semiconductor substrates. The pad includes a polishing layer having a rotational center and an annular polishing track concentric with the rotational center and has a width. The width of the annular polishing track is free of non-radial grooves. And the pad has a plurality of radial micro-channels in the polishing layer within the width of the annular polishing track with a majority of the radial micro-channels having primarily a radial orientation and an average width less than 50 μm.
1. A polishing pad useful for polishing at least one of a magnetic, optical and semiconductor substrate, comprising:
a) a polishing layer having a rotational center and including an annular polishing track concentric with the rotational center and having a width, the width of the annular polishing track containing radial grooves, the radial grooves having an average cross sectional area; and
b) a plurality of radial micro-channels in the polishing layer within the width of the annular polishing track, the radial micro-channels having an average cross sectional area at a multiple of at least ten less than the average cross-sectional area of the radial grooves and a majority of the radial micro-channels having primarily a radial orientation.
2. The polishing pad according to claim 1 , wherein the majority of the radial micro-channels do not intersect the radial grooves.
3. The polishing pad according to claim 1 , wherein the polishing layer includes curved-radial grooves and the radial micro-channels include curved-radial micro-channels.
4. The polishing pad according to claim 1 , wherein the polishing layer includes no grooves having an average cross-sectional area of at least 15,000 μm 2 within the annular polishing track.
5. A method of polishing at least one of a magnetic, optical and semiconductor substrate in the presence of a polishing medium, comprising:
polishing with a polishing pad, the polishing pad including a polishing layer having a rotational center and including an annular polishing track concentric with the rotational center and having a width, the width of the annular polishing track containing radial grooves, the radial grooves having an average cross-sectional area; and a plurality of radial micro-channels in the polishing layer within the width of the annular polishing track, the radial micro-channels having an average cross-sectional area at a multiple of at least ten less than the avenge cross-sectional area of the radial grooves and a majority of the radial micro-channels having primarily a radial orientation; and
conditioning the pad during polishing to introduce additional radial micro-channels.
6. The method of claim 5 wherein the conditioning introduces the micro-channels where the majority of the radial micro-channels do not intersect the radial grooves.
7. The method of claim 5 wherein the radial grooves arc curved-radial grooves and the conditioning introduces curved-radial micro-channels.