Method to form a nonmagnetic cap for the NiFe(free) MTJ stack to enhance dR/R
View Patent ↗An MTJ in an MRAM array or TMR read head is disclosed in which a capping layer has a bilayer configuration with a non-magnetic NiFeX inner layer on a NiFe free layer and a Ta layer on the NiFeX layer to improve dR/R and minimize magnetostriction. Optionally, a trilayer configuration may be employed where the Ta layer is sandwiched between an inner NiFeX layer and an outer Ru layer. The X component in NiFeX is preferably an element having an oxidation potential greater than Ni or Fe such as Mg, Hf, Zr, Nb, or Ta. NiFeX is preferably formed by co-sputtering a NiFe target with an X target at a forward power of about 200 W and 50 W, respectively. In an MRAM structure, the Mg content in NiFeMg may be increased to >50 atomic % to improve the gettering power of removing oxygen from the free layer.
1. An MTJ element formed between a bottom conductor layer and a top conductor layer in a magnetic device, comprising:
a composite capping layer wherein said capping layer is comprised of a non-ferromagnetic NiFeX layer formed on a free layer, a Ta layer on the NiFeX layer wherein X is an element having an oxidation potential greater than Ni or Fe, and an upper metal layer formed on the Ta layer.
2. The MTJ element of claim 1 wherein the magnetic device is an MRAM and the free layer is comprised of NiFe or wherein the magnetic device is a TMR read head and the free layer is comprised of a NiFe layer on a FeCo layer and said NiFeX layer is formed on the NiFe layer in said MRAM or in said TMR read head.
3. The MTJ element of claim 1 further comprised of a seed layer, an AFM pinning layer, a SyAP pinned layer, a tunnel barrier layer which are sequentially formed on the bottom conductor and said free layer is formed on the tunnel barrier layer.
4. The MTJ element of claim 2 wherein the X element in the NiFeX layer is Mg, Hf, Nb, Zr, or Ta.
5. The MTJ element of claim 4 wherein X is Mg and the NiFeMg layer is formed in an MRAM and has a composition represented by Ni R Fe S Mg T where R+S+T is 100 and R is from about 40 to 70 atomic %, S is from about 7 to 12 atomic %, T is from about 40 to 55 atomic %, and the ratio R/S is about 4:1.
6. The MTJ element of claim 4 wherein X is Mg and the NiFeMg layer is formed in TMR read head and has a composition represented by Ni R Fe S Mg T where R+S+T is 100 and R is from about 40 to 70 atomic %, S is from about 7 to 12 atomic %, T is from about 20 to 30 atomic %, and the ratio R/S is about 9:1.
7. The MTJ element of claim 1 wherein said NiFeX layer has a thickness from about 10 to 30 Angstroms and said Ta layer has a thickness from about 30 to 100 Angstroms.
8. The MTJ element of claim 1 wherein the composite upper metal layer is comprised of Ru with a thickness of about 30 to 100 Angstroms.
9. The MTJ element of claim 1 wherein said MTJ has magnetostriction and dR/R values that can be adjusted by changing the thickness of the NiFeX layer or the atomic % of the X element in the NiFeX layer.
10. An MTJ element formed between a bottom conductor layer and a top conductor layer in a magnetic device, comprising:
a pinned layer;
a tunnel barrier layer formed on the pinned layer;
a free layer formed on the tunnel barrier layer; and
a composite capping layer comprised of a non-ferromagnetic NiFeMg layer formed on said free layer, and a Ta layer formed on the NiFeMg layer.
11. The MTJ element of claim 10 wherein the magnetic device is an MRAM and said NiFeMg layer has a composition represented by Ni R Fe S Mg T where R+S+T is 100 and R is from about 40 to 70 atomic %, S is from about 7 to 12 atomic %, T is from about 40 to 55 atomic %, and the ratio R/S is about 4:1.
12. The MTJ element of claim 10 wherein the magnetic device is a TMR read head and said NiFeMg layer has a composition represented by Ni R Fe S Mg T where R+S+T is 100 and R is from about 40 to 70 atomic %, S is from about 7 to 12 atomic %, T is from about 20 to 30 atomic %, and the ratio R/S is about 9:1.
13. The MTJ element of claim 10 wherein said NiFeMg layer has a thickness from about 10 to 30 Angstroms and said Ta layer has a thickness from about 30 to 100 Angstroms.