Self-aligned bipolar junction transistors
View Patent ↗A plurality of bipolar transistors are formed by forming a common conduction region, a plurality of control regions extending each in an own active areas on the common conduction region, a plurality of silicide protection strips, and at least one control contact region. Silicide regions are formed on the second conduction regions and the control contact region. The second conduction regions may be formed by selectively implanting a first conductivity type dopant areas on a first side of selected silicide protection strips. The control contact region is formed by selectively implanting an opposite conductivity type dopant on a second side of the selected silicide protection strips.
1. A method comprising:
forming bitlines extending in a first direction;
forming an etch mask that defines openings for implanting a base contact, an emitter, and a source of a field effect transistor; and
using said mask to form silicide on said source, said emitter, and said base contact, said silicide on said emitter being centered on said emitter in the first direction.
2. The method of claim 1 including using said mask to define an opening for said source by forming a sidewall spacer on a gate electrode.
3. The method of claim 1 including forming a plurality of bipolar transistors, said bipolar transistors having a common collector.
4. The method of claim 1 including forming said mask for emitter and base contact implants such that the emitter and base contact implants do not need to be aligned.
5. The method of claim 1 including forming a silicide over said emitter, source, and base contact.
6. The method of claim 5 wherein said silicide over said emitter, base, contact, and source is aligned by way of said etched mask.