Dicing die adhesive film for semiconductor

1. A dicing die adhesive film for semiconductor having a 3-layered structure comprising a first adhesive layer attached to the back of a semiconductor wafer; a second adhesive layer attached onto the first adhesive layer; and a dicing film attached onto the second adhesive layer, and used in conducting a semiconductor packaging process comprising: (a 1 ) a lamination process for attaching the dicing die adhesive film to the back of the semiconductor wafer, (a 2 ) a wafer dicing process for separating a die from die fragments by conducting a cutting operation through the front side of the laminated semiconductor wafer, (a 3 ) a die pick-up process for picking up the die separated by the dicing process so that the first adhesive layer and the second adhesive layer keep attached to the back of the die and the dicing film is separated using a pickup tool, (a 4 ) a die bonding process for attaching the picked-up die to the substrate, and (a 5 ) a curing process for enhancing an adhesive force between the substrate and the die,

wherein an interlayer adhesive force (T 1 ) between the semiconductor wafer and the first adhesive layer is maintained at 20 gf/cm or more, and an interlayer adhesive force (T 2 ) between the second adhesive layer and the dicing film is maintained at 3 gf/cm or more after the lamination process (a 1 );

wherein an interlayer adhesive force (Ta 1 ) between the die and the first adhesive layer is maintained at a higher level than an interlayer adhesive force (Ta 2 ) between the second adhesive layer and the dicing film during the die pick-up process (a 3 );

wherein an interlayer adhesive force (Tb 1 ) between the die and the first adhesive layer, and an interlayer adhesive force (Tb 2 ) between the second adhesive layer and the substrate are all maintained at a level greater than 100 gf/cm after the die bonding process (a 4 ); and

wherein an interlayer adhesive force (Tc 1 ) between the die and the first adhesive layer, and an interlayer adhesive force (Tc 2 ) between the second adhesive layer and the substrate are all maintained at a level greater than 500 gf/cm after the curing process (a 5 ).

2. The dicing die adhesive film for semiconductor according to claim 1 ,

wherein, after the curing process (a 5 ), the dicing die adhesive film has a storage modulus of 100 to 10,000 MPa at 25° C., and 0.1 to 1000 MPa at 280° C., and the storage modulus at 280° C. is maintained at a lower level than the storage modulus at 25° C.

3. The dicing die adhesive film for semiconductor according to claim 1 , further comprising an organic insulator layer between the first adhesive layer and the second adhesive layer constituting the dicing die adhesive film, the organic insulator layer being made of at least one material selected from the group consisting of polyimides, polyolefins, polyacetalates and polyvinyls.

4. The dicing die adhesive film for semiconductor according to claim 2 , further comprising an organic insulator layer between the first adhesive layer and the second adhesive layer constituting the dicing die adhesive film, the organic insulator layer being made of at least one material selected from the group consisting of polyimides, polyolefins, polyacetalates and polyvinyls.

5. The dicing die adhesive film for semiconductor according to claim 1 ,

wherein the first adhesive layer of the dicing die adhesive film is made of a composition including 0.5 to 15 parts by weight of a UV-initiator and 0.1 to 30 parts by weight of an inorganic filler, based on 100 parts by weight of the composition including 20 to 70% by weight of liquid epoxy resin and 30 to 80% by weight of solid epoxy resin;

wherein the second adhesive layer of the dicing die adhesive film is made of a composition including 0.5 to 15 parts by weight of a UV-initiator and 0.1 to 30 parts by weight of an inorganic filler, based on 100 parts by weight of the composition including 20 to 70% by weight of liquid epoxy resin and 30 to 80% by weight of solid epoxy resin; and

wherein the content of the inorganic filler is made up so that the inorganic filler included in the composition for manufacturing the second adhesive layer is greater than that of the inorganic filler included in the composition for manufacturing the first adhesive layer as much as 0.1 to 15 parts by weight;

wherein the content ratio of the solid epoxy resin to the liquid epoxy resin is made up so that the content ratio of the solid epoxy resin to the liquid epoxy resin included in the composition for manufacturing the second adhesive layer is greater than that of the solid epoxy resin to the liquid epoxy resin included in the composition for manufacturing the first adhesive layer as much as 2 to 50% by weight; and

wherein the content of the UV-initiator is made up so that the content of the UV-initiator included in the composition for manufacturing the second adhesive layer is greater than that of the UV-initiator included in the composition for manufacturing the first adhesive layer as much as 0.1 to 15 parts by weight.

6. The dicing die adhesive film for semiconductor according to claim 5 ,

wherein the liquid epoxy resin is at least one material selected from the group consisting of bisphenol-based epoxy, novolak-based epoxy and plastic epoxy;

wherein the solid epoxy resin is at least one material selected from the group consisting of bisphenol-based epoxy, novolak-based epoxy and plastic epoxy;

wherein the inorganic filler is at least one material selected from the group consisting of metals, metal oxides and silicones; and

wherein the UV-initiator is at least one material selected from the group consisting of α-hydroxyketones, phenylglyoxylates, α-aminoketones, benzyldimethylketals, phosphinoxides and metallocenes.

7. The dicing die adhesive film for semiconductor according to claim 5 , further comprising an organic insulator layer between the first adhesive layer and the second adhesive layer, the organic insulator layer being made of at least one material selected from the group consisting of polyimides, polyolefins, polyacetalates and polyvinyls.

8. The dicing die adhesive film for semiconductor according to claim 6 , further comprising an organic insulator layer between the first adhesive layer and the second adhesive layer, the organic insulator layer being made of at least one material selected from the group consisting of polyimides, polyolefins, polyacetalates and polyvinyls.

9. The dicing die adhesive film for semiconductor according to claim 5 ,

wherein a storage modulus at 25° C. ranges from 100 to 10,000 MPa, a storage modulus at 280° C. ranges from 0.1 to 1000 MPa, and the storage modulus at 280° C. is maintained at a lower level than the storage modulus at 25° C., after the curing process of the dicing die adhesive film.

10. The dicing die adhesive film for semiconductor according to the claim 9 , further comprising an organic insulator layer between first adhesive layer and the second adhesive layer, the organic insulator layer being made of at least one material selected from the group consisting of polyimides, polyolefins, polyacetalates and polyvinyls.

11. The dicing die adhesive film for semiconductor according to claim 6 ,

wherein a storage modulus at 25° C. ranges from 100 to 10,000 MPa, a storage modulus at 280° C. ranges from 0.1 to 1000 MPa, and the storage modulus at 280° C. is maintained at a lower level than the storage modulus at 25° C., after the curing process of the dicing die adhesive film.

12. The dicing die adhesive film for semiconductor according to the claim 11 , further comprising an organic insulator layer between first adhesive layer and the second adhesive layer, the organic insulator layer being made of at least one material selected from the group consisting of polyimides, polyolefins, polyacetalates and polyvinyls.