Contact structure of semiconductor device and method for fabricating the same
View Patent ↗A method for fabricating a contact of a semiconductor device includes the steps of forming a dielectric layer having a contact hole on a semiconductor substrate, forming an outgassing barrier layer comprising a poly-silicon layer to cover at least inner walls of the contact hole in order to prevent undesired outgassing from the dielectric layer, and depositing an aluminum layer on the outgassing barrier layer. The contact structure of the semiconductor device includes the aluminum layer filled in the contact layer formed on the semiconductor substrate, and the outgassing barrier layer formed under the aluminum layer to prevent outgassing from the dielectric layer. A fine contact can be formed along with the aluminum layer, thereby realizing the contact structure of a lower contact resistance. As a result, it is possible to realize stabilization of an overall contact resistance of the semiconductor device.
1. A method for fabricating a contact of a semiconductor device, the method comprising:
forming a dielectric layer having a contact hole on a semiconductor substrate;
forming an outgassing barrier layer comprising a conductive poly-silicon layer to prevent discharge of gas from the dielectric layer;
forming a metal wetting layer on the outgassing barrier layer; and
forming an aluminum layer on the wetting layer.
2. The method according to claim 1 , wherein the poly-silicon layer has a thickness of 100 Å.
3. The method according to claim 1 , further comprising:
doping phosphorus (P) or germanium (Ge) to the poly-silicon layer to impart conductivity to the poly-silicon layer.
4. The method according to claim 1 , further comprising: annealing the semiconductor device to induce silicidation between the poly-silicon layer and the metal wetting layer.
5. The method according to claim 4 , wherein annealing is performed at a temperature of at least 400° C.
6. The method according to claim 1 , wherein the poly-silicon layer is deposited in a tube furnace to cover at least walls of the contact hole.
7. The method according to claim 1 , further comprising: pre-cleaning the poly-silicon layer using a fluorine containing gas before forming the aluminum layer.
8. The method according to claim 1 , wherein the wetting layer comprises either a titanium layer or a titanium/titanium nitride/titanium layer.
9. The method according to claim 1 , comprising depositing the aluminum layer by:
forming a first aluminum layer on the wetting layer with Chemical Vapor Deposition (CVD);
forming a second aluminum layer on the first aluminum layer with Plasma Vapor Deposition (PVD); and
annealing the first and second aluminum layers at a temperature of at least 400° C.
10. The method according to claim 9 , comprising depositing the second aluminum layer by PVD using an aluminum target containing 2% or less of Si to prevent reaction with silicon of the outgassing barrier layer.
11. A method for fabricating a contact of a semiconductor device, the method comprising:
forming a dielectric layer having a contact hole on a semiconductor substrate;
forming an outgassing barrier layer comprising a poly-silicon layer to cover at least inner walls of the contact hole in order to prevent undesired outgassing from the dielectric layer; and
depositing an aluminum layer on the outgassing barrier layer.
12. The method according to claim 11 , further comprising:
doping phosphorus (P) or germanium (Ge) to the poly-silicon layer to impart conductivity to the poly-silicon layer.
13. The method according to claim 11 , comprising depositing the aluminum layer depositing by:
forming a metal wetting layer on the outgassing barrier layer;
forming a first aluminum layer on the wetting layer by Chemical Vapor Deposition (CVD);
forming a second aluminum layer on the first aluminum layer by Plasma Vapor Deposition (PVD); and
annealing the first and second aluminum layers at a temperature of at least 400° C.
14. The method according to claim 13 , further comprising: annealing the semiconductor device to induce silicidation between the poly-silicon layer and the metal wetting layer.
15. The method according to claim 13 , further comprising: pre-cleaning a surface of the poly-silicon layer with a fluorine containing gas in situ before or during deposition of the wetting layer.