SEMICONDUCTOR STRUCTURE INCLUDING ISOLATION REGION WITH VARIABLE LINEWIDTH AND METHOD FOR FABRICATION THEROF
A semiconductor structure includes a base semiconductor substrate having a doped region located therein, and an epitaxial region located over the doped region. The semiconductor structure also includes a final isolation region located with the doped region and the epitaxial region. The final isolation region has a greater linewidth within the doped region than within the epitaxial region. A method for fabricating the semiconductor structure provides for forming the doped region prior to the epitaxial region. The doped region may be formed with reduced well implant energy and reduced lateral straggle. The final isolation region with the variable linewidth provides a greater effective isolation depth than an actual trench isolation depth.
1 . A method for fabricating a semiconductor structure comprising:
(a) forming a sacrificial filler layer within a doped region within a semiconductor substrate;
(b) forming an epitaxial layer upon the semiconductor substrate and the sacrificial filler layer;
(c) patterning the epitaxial layer over the sacrificial filler layer to provide an aperture, the aperture having a linewidth less than the sacrificial filler layer;
(d) etching the sacrificial filler layer to form an enlarged aperture; and
(e) forming a final isolation region within the enlarged aperture, wherein the foregoing steps (a)-(e) provide:
the semiconductor substrate comprising a base semiconductor region, the doped region located over the base semiconductor region and the epitaxial layer located over the doped region; and
the final isolation region located within the doped region and the epitaxial layer, where the final isolation region has a greater linewidth within the doped region than within the epitaxial layer.
2 . The method of claim 1 wherein the etching the sacrificial filler layer provides the enlarged aperture with an inverted “T” shape.
3 . The method of claim 1 wherein etching the sacrificial filler layer provides the enlarged aperture with a wider linewidth within the doped region than within the epitaxial layer.
4 . The method of claim 1 wherein the forming the final isolation region within the doped region provides for forming the final isolation region within a laterally adjoining pair of doped regions of different polarity.