Method for wafer level packaging and fabricating cap structures
View Patent ↗A cap wafer with cavities is etched through areas not covered by a patterned photoresist to form a plurality of openings. The cap wafer is bonded to a transparent wafer at the surface having the cavities and is segmented around the cavities to form a plurality of cap structures. The cap structures are hermetically sealed to a device wafer to form hermetic windows over devices and pads located on the device wafer.
1. A method for wafer level packaging comprising steps of:
providing a cap wafer;
forming a plurality of cavities on a surface of the cap wafer;
forming a patterned photoresist on the cap wafer and etching the cap wafer through the patterned photoresist to form a plurality of openings, then removing the patterned photoresist;
bonding the cap wafer to a transparent wafer at the surface having the cavities, wherein the cavities are not bonded to the transparent wafer;
segmenting the cap wafer around the cavities and removing a portion of the cap wafer not bonded to the transparent wafer to form a plurality of cap structures;
providing a device wafer with a plurality of devices and a plurality of contact pads electrically connected to the devices; and
hermetically bonding the cap structures to the device wafer at positions corresponding to the devices to form a plurality of hermetic windows.
2. The method of claim 1 , wherein the devices are optical devices, microelectromechanical systems (MEMS), or semiconductor devices.
3. The method of claim 1 , further comprising a thinning process applied to the cap wafer before segmenting the cap wafer for adjusting a range between the cap structure and the device wafer.
4. The method of claim 1 , wherein the cavities are used to define shapes and sizes of the hermetic windows.
5. The method of claim 1 , wherein the patterned photoresist is formed corresponding to the cavities.
6. The method of claim 5 , wherein the patterned photoresist and the cavities are formed at the same surface of the cap wafer.
7. The method of claim 5 , wherein the patterned photoresist is formed at the opposite surface to the cavities.
8. The method of claim 5 , wherein areas covered by the patterned photoresist are larger than the cavities.
9. The method of claim 1 , wherein the cap wafer is a semiconductor wafer.
10. The method of claim 1 , wherein the transparent wafer is a glass wafer or a quartz wafer.
11. The method of claim 1 , wherein the cap wafer and the transparent wafer are bonded by an anodic bonding process or a fusion bonding process.
12. The method of claim 1 , wherein the cap structure and the device wafer are bonded by a eutectic bonding process or a glass frit bonding process.
13. The method of claim 1 further comprising steps performed after hermetically bonding the cap structures to the device wafer, the steps comprising:
segmenting the cap structure at positions corresponding to the contact pads to expose the contact pad; and
dicing the device wafer to obtain a plurality of packages.