Semiconductor device having carrier mobility raised by generating strain in channel region
A transistor is formed in the active region of a semiconductor substrate. A sidewall structure is disposed on the sidewalls of a gate electrode. A stress control film covers the semiconductor substrate. The sidewall structure includes a first portion extending along partial upper sidewalls of the gate electrode, a second portion extending from partial lower sidewalls of the gate electrode to partial surfaces of the active region, a third portion extending along partial surfaces of the first active region outer than the second portions, and a fourth portion facing the sidewalls of the gate electrode and an upper surface of the active region via the first to third portions. A Young's modulus of the first portion is lower than that of the third portion. The transistor is of an n-type and stress in the stress control film is tensile, or the transistor is of a p-type and stress is compressive.
1. A semiconductor device comprising:
a semiconductor substrate including a first active region of a first conductivity type;
a first transistor including a gate electrode disposed over the first active region, a source region and a drain region of a second conductivity type opposite to the first conductivity type formed in the first active region on both sides of the gate electrode;
a first sidewall structure disposed on sidewalls of the gate electrode of the first transistor and on a surface of the first active region on both sides of the gate electrode; and
a first stress control film accumulating stress therein and covering the gate electrode of the first transistor, the first sidewall structure and the first active region,
wherein:
the first sidewall structure comprises a first portion extending along partial upper sidewalls of the gate electrode, a second portion extending from partial lower sidewalls of the gate electrode to partial surfaces of the first active region, a third portion extending along partial surfaces of the first active region outside the second portion, and a fourth portion facing the sidewalls of the gate electrode and an upper surface of the first active region across the first to third portions, and a Young's modulus of the first portion is lower than a Young's modulus of the third portion, and a Young's modulus of the first portion is lower than a Young's modulus of the second portion;
the source and drain regions of the first transistor is an n-type and the stress in the first stress control film is tensile stress, or the source and drain regions of the first transistor is a p-type and the stress in the first stress control film is compressive stress;
an edge of the second portion far from the gate electrode is further from the gate electrode than a surface of the fourth portion facing the sidewall of the gate electrode, and
Young's modulus of the third portion is higher than Young's modulus of the second portion on the partial lower sidewalls of the gate electrode, and is higher than Young's modulus of the second portion further from the gate electrode than the surface of the fourth portion facing the sidewall of the gate electrode.
2. The semiconductor device according to claim 1 , wherein the first portion is a cavity.
3. The semiconductor device according to claim 2 , wherein an average thickness of the third portion is thicker than an average thickness of the first portion.
4. The semiconductor device according to claim 1 , further comprising:
a second active region of the second conductivity type formed in the semiconductor substrate;
a second transistor including a gate electrode disposed over the second active region and intersecting the second active region, a source region and a drain region of the first conductivity type formed in the second active region on both sides of the gate electrode;
a second sidewall structure disposed on sidewalls of the gate electrode of the second transistor and on a surface of the second active region on both sides of the gate electrode; and
a second stress control film accumulating stress therein, a sign of which is opposite to a sign of the stress of the first stress control film, and covering the gate electrode of the second transistor, the second sidewall structure and the second active region,
wherein the second sidewall structure comprises a first portion extending along partial upper sidewalls of the gate electrode of the second transistor, a second portion extending from partial lower sidewalls of the gate electrode of the second transistor to partial surfaces of the second active region, a third portion extending along partial surfaces of the second active region outside the second portion, and a fourth portion facing the sidewalls of the gate electrode of the second transistor and an upper surface of the second active region across the first to third portions, and a Young's modulus of the first portion is lower than a Young's modulus of the third portion.
5. The semiconductor device according to claim 1 wherein the second portion is made of silicon oxide.
6. The semiconductor device according to claim 1 wherein the third portion is filled with a first stress control film.
7. The semiconductor device according to claim 1 wherein a thickness of the third portion at an edge far from the gate electrode is thicker than a thickness of the third portion at an edge near the gate electrode.
8. The semiconductor device according to claim 7 , wherein the edge far from the gate electrode is on a side opposite to the gate electrode, and the edge near the gate electrode is facing the gate electrode.
9. The semiconductor device according to claim 7 , wherein the second portion and the third portion are in direct contact with the semiconductor substrate.
10. The semiconductor device according to claim 1 wherein the first portion is in contact with the second portion.
11. The semiconductor device according to claim 1 wherein a partial region of the second portion is disposed between the fourth portion and the gate electrode.
12. The semiconductor device according to claim 1 wherein the second portion on the partial surface of the first active region is in contact with the semiconductor substrate.
13. A semiconductor device comprising:
a semiconductor substrate including a first active region of a first conductivity type;
a first transistor including a gate electrode disposed over the first active region, a source region and a drain region of a second conductivity type opposite to the first conductivity type formed in the first active region on both sides of the gate electrode;
a first sidewall structure disposed on sidewalls of the gate electrode of the first transistor and on a surface of the first active region on both sides of the gate electrode;
a first stress control film accumulating stress therein and covering the gate electrode of the first transistor, the first sidewall structure and the first active region,
a second active region of the second conductivity type formed in the semiconductor substrate;
a second transistor having a gate electrode disposed on the second active region and intersecting the second active region, a source region and a drain region of the first conductivity type formed in a surface layer of the second active region on both sides of the gate electrode; and
a second sidewall structure disposed on sidewalls of the gate electrode of the second transistor and on a surface of the second active region on both sides of the gate electrode,
wherein:
the first sidewall structure comprises a first portion extending along partial upper sidewalls of the gate electrode, a second portion extending from partial lower sidewalls of the gate electrode to partial surfaces of the first active region, a third portion extending along partial surfaces of the first active region outside the second portion, and a fourth portion facing the sidewalls of the gate electrode and an upper surface of the first active region across the first to third portions, and a Young's modulus of the first portion is lower than a Young's modulus of the third portion;
the source and drain regions of the first transistor is an n-type and the stress in the first stress control film is tensile stress, or the source and drain regions of the first transistor is a p-type and the stress in the first stress control film is compressive stress;
the first stress control film covers also the gate electrode of the second transistor, the second sidewall structure and the second active region; and
wherein the second sidewall structure comprises a first portion extending along partial upper sidewalls of the gate electrode of the second transistor, a second portion extending from partial lower sidewalls of the gate electrode of the second transistor to partial surfaces of the second active region, a third portion extending along partial surfaces of the second active region outside the second portion, and a fourth portion facing the sidewalls of the gate electrode of the second transistor and an upper surface of the second active region across the first to third portions, and a Young's modulus of the first portion is higher than a Young's modulus of the third portion.
14. The semiconductor device according to claim 13 , wherein the third portion of the second sidewall structure is a cavity.
15. The semiconductor device according to claim 13 , wherein an average thickness of the third portion of the first sidewall structure is thicker than an average thickness of the third portion of the second sidewall structure.
16. The semiconductor device according to claim 13 , wherein the first portion and the second portion of the second sidewall structure are made of same material.