Barrier polishing fluid

1. A method for polishing tantalum-containing barrier materials of a semiconductor substrate with a polishing fluid including the step of polishing the semiconductor substrate with the polishing fluid polishing to remove at least a portion of the tantalum-containing barrier layer, the polishing fluid comprising:

a nitrogen-containing compound having at least two nitrogen atoms comprising at least one of a compound of a formula selected from the group comprising:

wherein R 1 comprises —H or —NH 2 and R 2 , R 3 , R 4 , R 5 and R 6 independently comprise substituents selected from the group consisting of —H, a hydrocarbon group, an amino group, a carbonyl group, an imido group, an azo group, a cyano group, a thio group, a seleno group and —OR 7 where R 7 comprises a hydrocarbon group, and the nitrogen-containing compound being free of electron-withdrawing substituents; and the polishing fluid being capable of removing the tantalum-containing barrier materials from a surface of the semiconductor substrate without an abrasive.

2. The method of claim 1 , wherein the polishing fluid has 0 to 5 weight percent abrasive particles.

3. The method of claim 1 , wherein the nitrogen-containing compound contains the imine compound.

4. The method of claim 1 , wherein the nitrogen-containing compound contains the hydrazine compound.

5. A method for polishing tantalum-containing barrier materials of a semiconductor substrate with a polishing fluid including the step of polishing the semiconductor substrate with the polishing fluid polishing to remove at least a portion of the tantalum-containing barrier layer, the polishing fluid comprising:

0 to 6 inhibitor for reducing the removal of an interconnect metal;

0 to 1 weight percent abrasive particles;

0 to 25 oxidizing agent;

0 to 15 complexing agent and

0.05 to 25 nitrogen-containing compound having at least two nitrogen atoms comprising at least one of a compound of a formula selected from the group comprising:

wherein R 1 comprises —H or —NH 2 and R 2 , R 3 , R 4 , R 5 and R 6 independently comprise substituents selected from the group consisting of —H, a hydrocarbon group, an amino group, a carbonyl group, an imido group, an azo group, a cyano group, a thio group, a seleno group and —OR 7 where R 7 comprises a hydrocarbon group, and the nitrogen-containing compound having an electron-donating substituent; and the polishing fluid being capable of removing the tantalum-containing barrier materials from a surface of the semiconductor substrate without an abrasive.

6. The method of claim 5 , wherein the polishing fluid contains no abrasive particles.

7. The method of claim 5 , wherein the nitrogen-containing compound contains the imine compound and the imine compound contains at least one selected from at least one of the group comprising 1,3-diphenyl guanidine, guanidine hydrochloride, tetramethylguanidine, formamidine acetate and acetamidine hydrochloride.

8. The method of claim 5 , wherein the nitrogen-containing compound contains the hydrazine compound and the hydrazine compound contains at least one selected from at least one of the group comprising carbohydrazide, acetic hydrazide, semicarbazide hydrochloride, and formic hydrazide.

9. The method of claim 5 wherein the tantalum-containing barrier layer contains tantalum and the polishing removes the at least a portion of the tantalum of the tantalum-containing barrier layer.

10. The method of claim 5 wherein the tantalum-containing barrier layer contains tantalum-nitride and the polishing removes the at least a portion of the tantalum-nitride of the tantalum-containing barrier layer.