Method for increasing manufacturability of a circuit layout
View Patent ↗According to one exemplary embodiment, a method for increasing manufacturability of a circuit layer includes determining a threshold value for at least one image property from a repetitive section of the circuit layout. According to this embodiment, the method further includes performing a simulated lithographic process using the circuit layout to determine a number of simulated values of the at least one image property for a non-repetitive section of the circuit layout. The method further includes comparing each of the simulated values with the threshold value to determine printability of the non-repetitive section of the circuit layout prior to lithographically printing the circuit layout on a wafer. The method further includes modifying the non-repetitive section of the circuit layout if the threshold value is greater than at least one of the simulated values. By modifying the non-repetitive section of the circuit layout, manufacturability of the circuit layout can be increased.
1. A method for increasing manufacturability of a circuit layout, said method comprising steps of:
determining a threshold value for at least one image property from a repetitive section of said circuit layout;
performing a simulated lithographic process using said circuit layout to determine a first plurality of simulated values of said at least one image property for a non-repetitive section of said circuit layout;
comparing each of said first plurality of simulated values with said threshold value to determine printability of said non-repetitive section of said circuit layout prior to lithographically printing said circuit layout on a wafer.
2. The method of claim 1 further comprising a step of modifying said non-repetitive section of said circuit layout if at least one of said first plurality of simulated values is less than said threshold value.
3. The method of claim 2 wherein said step of modifying said non-repetitive section of said circuit layout increases manufacturability of said circuit layout.
4. The method of claim 1 wherein said at least one image property is selected from the group consisting of Imax, Imin, Slope, Contrast, and Curvature.
5. The method of claim 1 wherein said repetitive section of said circuit layout is printed on said wafer using a lithographic process such that said lithographic process does not cause said repetitive section of said circuit layout to fail.
6. The method of claim 1 wherein said repetitive section of said circuit layout comprises a plurality of features, wherein said plurality of features in said repetitive section of said circuit layout is arranged in a repetitive geometrical design.
7. The method of claim 1 wherein said non-repetitive section of said circuit layout comprises a plurality of features, wherein said plurality of features in said non-repetitive section of said circuit layout is arranged in a non-repetitive geometrical design.
8. The method of claim 1 wherein said repetitive section of said circuit layout comprises a core section of a memory device, wherein said core section of said memory device comprises a plurality of memory cells.
9. The method of claim 8 wherein said non-repetitive section of said circuit layout comprises a peripheral section of said memory device.
10. A method for increasing manufacturability of a circuit layout, said method comprising steps of:
determining a threshold value for at least one image property from a repetitive section of said circuit layout;
performing a simulated lithographic process using said circuit layout to determine a first plurality of simulated values of said at least one image property for a non-repetitive section of said circuit layout;
comparing each of said first plurality of simulated values with said threshold value;
modifying said non-repetitive section of said circuit layout if at least one of said first plurality of simulated values is less than said threshold value.
11. The method of claim 10 wherein said step of comparing each of said first plurality of simulated values with said threshold value is performed to determine printability of said non-repetitive section of said circuit layout prior to lithographically printing said circuit layout on a wafer.
12. The method of claim 10 wherein said step of modifying said non-repetitive section of said circuit layout increases manufacturability of said circuit layout.
13. The method of claim 10 wherein said at least one image property is selected from the group consisting of Imax, Imin, Slope, Contrast, and Curvature.
14. The method of claim 10 wherein said repetitive section of said circuit layout is printed on said wafer using a lithographic process such that said lithographic process does not cause said repetitive section of said circuit layout to fail.
15. The method of claim 10 wherein said repetitive section of said circuit layout comprises a plurality of features, wherein said plurality of features in said repetitive section of said circuit layout is arranged in a repetitive geometrical design.
16. The method of claim 10 wherein said non-repetitive section of said circuit layout comprises a plurality of features, wherein said plurality of features in said non-repetitive section of said circuit layout is arranged in a non-repetitive geometrical design.
17. The method of claim 10 wherein said repetitive section of said circuit layout comprises a core section of a memory device, wherein said core section of said memory device comprises a plurality of memory cells.
18. The method of claim 17 wherein said non-repetitive section of said circuit layout comprises a peripheral section of said memory device.