Apparatus and method for manufacturing a semiconductor device
View Patent ↗An apparatus for manufacturing a semiconductor device includes an upper mold ( 21 ), a lower mold ( 22 ), and a plate ( 30, 130, 230 ) that includes at least one cavity ( 31 ) that receives resin and defines an outer shape and a thickness of a resin sealing portion, and a gate ( 32 ) through which the resin is guided to the cavity ( 31 ), the plate ( 30 ) being interposed between the upper mold ( 21 ) and the lower mold ( 22 ). The plate ( 130 ) further includes a resin film ( 132 ) fixed by viscoelastic or adhesive bonding to a side of thin plates ( 131 ) towards a substrate on which electrodes are provided. The semiconductor device is provided which has no resin burrs that occur on a substrate in an end portion of the molded body. The plate ( 30, 130, 230 ) is formed by multiple thin plates ( 231, 232, 233 ) joined by welding or positioned by positioning pins ( 237, 238 ).
1. An apparatus for manufacturing a semiconductor device comprising:
an upper mold;
a lower mold having a supply port formed therein for providing resin therethrough; and
a plate being interposed between the upper mold and the lower mold and including at least one cavity that receives the resin and defines an outer shape and a thickness of a resin sealing portion and a gate coupling to the supply port through a runner formed in either the upper mold or the lower mold, the resin being guided to the cavity to which the gate is connected through the runner and the gate, wherein the plate comprises a resin film provided on a side thereof that contacts a substrate of the semiconductor device.
2. The apparatus as claimed in claim 1 , wherein the plate is fixed to the side thereof that contacts the substrate of the semiconductor device by viscoelastic or adhesive bonding.
3. The apparatus as claimed in claim 1 , wherein the plate and the resin film have a through hole into which a given pin is inserted.
4. The apparatus as claimed in claim 1 , wherein the plate comprises multiple thin plates that are laminated.
5. The apparatus as claimed in claim 4 , wherein the multiple thin plates are laminated and bonded by welding.
6. An apparatus for manufacturing a semiconductor device comprising:
an upper mold;
a lower mold; and
a plate that includes at least one cavity that receives resin and defines an outer shape and a thickness of a resin sealing portion, and a gate through which the resin is guided to the cavity to which the gate is connected, the plate being interposed between the upper mold and the lower mold, wherein the plate comprises multiple thin plates that are laminated, and the gate is provided in an uppermost one of the multiple thin plates.
7. The apparatus as claimed in claim 6 , wherein the multiple thin plates have through holes that are provided in corresponding positions, a given pin being inserted into the through holes.
8. The apparatus as claimed in claim 6 , wherein the plate is fixed to the upper and lower molds by a positioning pin.
9. The apparatus as claimed in claim 6 , wherein the plate has a portion that contacts the resin, said portion being coated with fluorocarbon resin or being plated with gold.
10. A method of fabricating a semiconductor device comprising:
placing a plate between an upper mold and a lower mold, wherein the plate comprises multiple thin plates that are laminated, the plate including at least one cavity that receives resin and defines an outer shape and a thickness of a resin sealing portion and a gate through which the resin is guided to the cavity to which the gate is connected, the resin guided to the cavity to which the gate is connected from an output of a runner formed in either in the upper mold or the lower mold, a substrate of the semiconductor device being provided on the plate; and
supplying resin from a supply port provided in the lower mold to the runner and thence to the cavity via the gate connected to the cavity, coupled to the runner and provided in the plate to form the resin sealing portion over the substrate.
11. The apparatus as claimed in claim 4 , wherein the multiple thin plates have through holes that are provided in corresponding positions, a given pin being inserted into the through holes.
12. The apparatus as claimed in claim 6 , wherein the cavity has an opening area that varies in a thickness direction of the plate.
13. The apparatus as claimed in claim 6 , wherein the gate has an opening area that varies in a thickness direction thereof.
14. The apparatus as claimed in claim 6 , wherein the gate is provided at a position at which the resin is supplied from a side of the cavity.
15. The apparatus as claimed in claim 6 , wherein the plate comprises a resin film provided on a side thereof that contacts a substrate of the semiconductor device.
16. The apparatus as claimed in claim 15 , wherein the plate is fixed to the side thereof that contacts the substrate of the semiconductor device by viscoelastic or adhesive bonding.
17. The apparatus as claimed in claim 6 , wherein the multiple thin plates are laminated and bonded by welding.