Granted Patent B2

US 7,675,104 · App. 11/461,131 · Granted Mar 9, 2010

Abstract

Claims (29)

1. An integrated circuit memory system comprising:

a substrate; and

a silicon rich charge storage layer over the substrate having a first isolation trench through the silicon rich charge storage layer in a first direction and a second isolation trench through the silicon rich charge storage layer in a second direction;

said silicon rich charge storage layer comprising silicon rich nitride having an atomic ratio of silicon to nitrogen that is greater than 3:4.

2. The system as claimed in claim 1 further comprising:

a top dielectric layer over the silicon rich charge storage layer; and

a bottom dielectric layer under the silicon rich charge storage layer and on the substrate.

3. The system as claimed in claim 1 wherein:

the silicon rich charge storage layer includes a layer of said silicon rich nitride with a thickness under 150 angstroms.

4. The system as claimed in claim 1 further comprising:

a trench fill material that fills the first isolation trench above the level of the silicon rich charge storage layer.

5. The system as claimed in claim 1 further comprising:

a trench fill material that fills the first isolation trench below the level of a first hardmask layer.

6. An integrated circuit memory system comprising:

a substrate having a bitline implant;

a silicon rich charge storage layer over the substrate, said silicon rich charge storage layer comprising silicon rich nitride having an atomic ratio of silicon to nitrogen that is greater than 3:4;

a first hardmask layer over the silicon rich charge storage layer;

a second hardmask layer over the first hardmask layer having a first isolation trench through the second hardmask layer, the first hardmask layer, the silicon rich charge storage layer, the substrate, and the bitline implant in a first direction to form a bitline;

a trench fill material in the first isolation trench; and

a conductive layer over the trench fill material and the first hardmask layer having a second isolation trench through the conductive layer, the first hardmask layer, and the silicon rich charge storage layer in a second direction to form a wordline.

7. The system as claimed in claim 6 further comprising:

a top dielectric layer over the silicon rich charge storage layer; and

a bottom dielectric layer on the substrate under the silicon rich charge storage layer having the second isolation trench into but not through the bottom dielectric layer.

8. The system as claimed in claim 6 wherein:

the silicon rich charge storage layer includes a layer of said silicon rich nitride with a thickness between about 40 to 150 angstroms.

9. The system as claimed in claim 6 wherein:

the trench fill material tills the first isolation trench with an insulator above the level of the silicon rich charge storage layer.

10. The system as claimed in claim 6 wherein:

the trench fill material fills the first isolation trench with an insulator below the level of the first hardmask layer.

Assignments (9)