Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
View Patent ↗The present invention is; (a) a process for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of a free radical scavenger polymerization inhibitor to such cyclotetrasiloxane; and (b) a composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization used in a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication, comprising; such cyclotetrasiloxane and a free radical scavenger polymerization inhibitor.
1. A process for stabilizing a cyclotetrasiloxane against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication, comprising; providing an effective amount of a free radical polymerization inhibitor to said cyclotetrasiloxane having the following formula:
where R 1-7 are individually selected from the group consisting of hydrogen, a normal, branched or cyclic C 1-10 alkyl group, and a C 1-4 alkoxy group, wherein the free radical scavenger is 2,6-di-tert-butyl-4-methyl phenol and the 2,6-di-tert-butyl-4-methyl phenol is present in an amount of 150 ppm.