Method of manufacturing a semiconductor device and the semiconductor device
View Patent ↗The present invention provides a method of manufacturing a trench with a rounded corner portion and a broadened opening. Anisotropic oxidation is carried out using a halogen oxidation method using dichloroethylene (DCE) to form an anisotropic oxide film such that the film thickness in a shoulder portion of the trench is thick and gradually decreases nearer the bottom, the anisotropic oxide film is removed, and the shoulder portion of the trench is preferentially backed off, thereby rounding the shoulder portion sufficiently to broaden the opening. Then, an insulating member is embedded in the trench. The rounded portion of the shoulder portion of the trench and vicinity thereof is used as a channel of a MOS transistor.
1. A method of manufacturing a semiconductor device, comprising:
forming a first trench in a semiconductor substrate, the first trench having a first opening size;
performing oxidation with anisotropy on an inner surface of the first trench to form a sacrifice oxide film, the sacrifice oxide film having a thickness that is different locally such that a thickness of the sacrifice oxide film in a shoulder portion of the first trench is thicker than a thickness of the sacrifice oxide film in a portion other than the shoulder portion of the first trench;
removing the sacrifice oxide film to preferentially back off the shoulder portion of the trench while rounding a shape of the shoulder portion, the first trench being thereby converted into a second trench that has a second opening size that is larger than the first opening size of the first trench;
performing isotropic oxidation on an inner surface of the second trench to form an oxide film on the inner surface of the second trench, a substantial entirety of the oxide film has substantially a uniform thickness so that an opening size defined by the oxide film is smaller than the second opening size of the second trench and larger than the first opening size of the first trench; and
filling the second trench with an insulating film with an intervention of the oxide film.
2. The method as claimed in claim 1 , wherein the forming the first trench comprises:
forming on the semiconductor substrate a mask layer having an opening, the opening being defined by a side surface of the mask layer;
forming a sidewall spacer on the side surface of the mask layer defining the opening; and
etching the semiconductor substrate by using the mask layer and the sidewall spacer as the mask to form the first trench.
3. The method as claimed in claim 2 , wherein the forming the first trench further comprises removing the sidewall spacer after the etching the semiconductor substrate, and each of the performing oxidation with anisotropy, the removing the sacrifice oxide film, the performing isotropic oxidation and the filling the second trench is carried out while keeping the mask layer left.
4. The method as claimed in claim 3 , further comprising removing the mask layer after the filling the second trench.
5. The method as claimed in claim 1 , wherein the forming the first trench comprises:
forming on the semiconductor substrate a mask layer having an opening; and
etching the semiconductor substrate by using the mask layer as the mask to form the first trench; and
wherein each of the performing oxidation with anisotropy, the removing the sacrifice oxide film, the performing isotropic oxidation and the filling the second trench is carried out while keeping the mask layer left.
6. The method as claimed in claim 5 , further comprising removing the mask layer after the filling the second trench.