Transparent polishing pad
View Patent ↗The present invention relates to a polishing pad useful for planarizing a substrate in a CMP process using a polishing composition. The polishing pad is transparent and allows for the use of an in-situ optical end-point detection apparatus without the need for a separate aperture or window in the polishing pad.
1. A transparent polishing pad useful for polishing a substrate in a chemical mechanical polishing process using a polishing composition and an in-situ optical end-point detection apparatus, the polishing pad comprising:
a polymeric matrix material having a first refractive index;
a plurality of polymeric capsules having cavities embedded within and optically connected to the polymeric matrix material, the polymeric capsules comprising a polymeric shell having a diameter, a thickness and a second refractive index within 30% of the first refractive index of the polymeric matrix, a liquid core contained within the cavities and optically connected to the polymeric shell having a third refractive index within 30% of the first refractive index of the polymeric matrix, the liquid core being water with incidental impurities; and
a polishing surface comprising the polymeric matrix material and a plurality of asperities defined by the cavities of the embedded polymeric capsules exposed at the polishing surface.
2. The polishing pad of claim 1 wherein the polymeric shell prevents the liquid core from contacting the polymeric matrix material before the polishing pad is formed and the polymeric shell opens during polishing to create an asperity for allowing the polishing composition to displace the liquid core and transporting the polishing composition.
3. The polishing pad of claim 1 wherein the polymeric shell prevents the liquid core from contacting the polymeric matrix material before the polishing pad is formed and the polymeric shell dissolves after the polishing pad is formed creating a cavity in the polymeric matrix and the cavity opens during polishing to create an asperity for allowing the polishing composition to displace the liquid core and transporting the polishing composition.
4. The polishing pad of claim 1 wherein the diameter of the polymeric capsule is 1 μm to 150 μm.
5. The polishing pad of claim 1 wherein the polishing pad is transparent to at least one wavelength of laser light that allows for in-situ optical end-point detection.
6. The polishing pad of claim 5 wherein the polishing pad is transparent to laser light of a wavelength of 640 nm to 670 nm.
7. The polishing pad of claim 1 wherein the polymeric shell has a thickness of 0.1 to 5 μm.
8. The polishing pad of claim 1 wherein the polymeric shell is PDVC.
9. The polishing pad of claim 1 wherein the second refractive index refractive index of the polymeric shell is within 20% of the first refractive index of the polymeric matrix, and the third refractive index of the liquid core is within 20% of the first refractive index of the polymeric matrix.