Method for forming a gate dielectric of a semiconductor device
View Patent ↗Disclosed is a method for forming a gate dielectric in a semiconductor device. The present method includes forming a first dielectric layer on a semiconductor substrate; removing a portion of the first dielectric layer to expose a portion of the substrate; forming a nitride layer on the exposed portion of the substrate and the first dielectric layer; forming a transition metal layer on the nitride layer; and oxidizing the transition metal layer to form a transition metal oxide layer.
1. A method for forming a gate dielectric in a semiconductor device, comprising the steps of:
forming a first dielectric layer on a semiconductor substrate;
removing a portion of the first dielectric layer to expose a first portion of the substrate;
forming a nitride layer on the exposed first portion of the substrate and the first dielectric layer;
forming a transition metal layer on the nitride layer; and
oxidizing the transition metal layer to form a transition metal oxide layer.
2. The method of claim 1 , wherein forming the first dielectric layer comprises thermally oxidizing the semiconductor substrate.
3. The method of claim 1 , wherein forming the nitride layer comprises a chemical vapor deposition (CVD) process.
4. The method of claim 3 , wherein forming the nitride layer comprises heating the semiconductor substrate in an atmosphere comprising a silane and a nitrogen source gas.
5. The method of claim 3 , wherein the CVD process is performed at a temperature of 300° C. to 500° C.
6. The method of claim 1 , wherein the nitride layer is formed using a forming gas.
7. The method of claim 1 , wherein depositing the transition metal layer comprises a physical vapor deposition (PVD) sputtering process or a chemical vapor deposition (CVD) process.
8. The method of claim 1 , wherein the transition metal layer comprises at least one member selected from the group consisting of tantalum (Ta), aluminum (Al), zirconium (Zr), titanium (Ti), nickel (Ni), and hafnium (Hf).
9. The method of claim 1 , wherein oxidizing the transition metal layer comprises a rapid thermal oxidation process.
10. The method of claim 1 , further comprising the steps of:
forming a second dielectric layer on the exposed first portion of the substrate; and
removing a portion of the second dielectric layer to expose a second portion of the substrate,
wherein forming the nitride layer further comprises forming the nitride layer on the exposed second portion of the substrate, the first dielectric layer, and the second dielectric layer.
11. The method of claim 8 , wherein forming at least one of the first and second dielectric layers comprises thermally oxidizing the substrate.