Probe array wafer
View Patent ↗A probe array wafer includes a substrate upon which a plurality of compliant probes are mounted. Pairs of axially aligned probes may be electrically connected together to provide a pass through power connection from the test equipment to the device under test. Likewise, pairs of axially aligned probes may be electrically connected together to provide a ground connection from the test equipment to the device under test.
1. An electrical probe assembly, comprising:
a housing having open ends,
a plurality of insulating substrates mounted in said housing,
a plurality of compliant probes secured to each of said insulating substrates and arranged in two generally aligned rows, each of said probes having a tip extending beyond an edge of said insulating substrate,
said tips of said plurality of compliant probes in said first row for contacting a test fixture, said tips of said plurality of compliant probes in said second row for contacting one or more devices under test, and
a pair of end caps fastened to said open ends of said housing, each of said end caps having a plurality of apertures in axial alignment with said probe tips,
whereas select ones of said plurality of probes in said first row are connected to select ones of said probes in said second row, and whereas said probe tips extend through said apertures of said end caps.
2. The electrical probe assembly as set forth in claim 1 wherein said plurality of probes are compliant spring probes.
3. The electrical probe assembly as set forth in claim 1 wherein said plurality of probes are compliant bent metal probes.
4. The electrical probe assembly as set forth in claim 1 wherein said each of said plurality of insulating substrates includes a plurality of spaced apart grooves each adapted to receive one of said compliant probes.
5. The electrical probe assembly as set forth in claim 1 wherein each of said insulating substrates includes one or more conducting layers.
6. The electrical probe assembly as set forth in claim 1 further comprising a passive electronic filter mounted to said substrate and in communication between one or more probes in said first row and one or more probes in said second row.
7. The electrical probe assembly as set forth in claim 1 further comprising an active electronic filter mounted to said substrate and in communication between one or more probes in said first row and one or more probes in said second row.
8. The electrical probe assembly as set forth in claim 1 further comprising a microprocessor mounted to said substrate and in communication between one or more probes of said first row and one or more probes of said second row.
9. The electrical probe assembly as set forth in claim 1 further comprising active and passive electronic components mounted to said substrate and in communication between one or more probes of said first row and one or more probes of said second row.
10. An electrical probe assembly comprising:
an insulating substrate;
a plurality of compliant probes secured to said insulating substrate and arranged in two generally aligned rows, each of said probes having a tip extending beyond an edge of said insulating substrate;
said tips of said plurality of compliant probes in said first row for contacting a test fixture, said tips of said plurality of compliant probes in said second row for contacting one or more devices under test,
whereas select ones of said plurality of probes in said first row are connected to select ones of said probes in said second row;
a housing adapted to receive and secure a plurality of said substrates in an aligned and spaced apart relationship; and
a pair of end caps fastened to said housing, each of said end caps having a plurality of spaced apart apertures axially aligned with said plurality of compliant probes extending from said substrates, said apertures adapted to receive said compliant probe tips therethrough.
11. The electrical probe assembly as set forth in claim 10 wherein said plurality of probes are compliant spring probes.
12. The electrical probe assembly as set forth in claim 10 wherein said plurality of probes are compliant bent metal probes.
13. The electrical probe assembly as set forth in claim 10 wherein said insulating substrate includes a plurality of spaced apart grooves each adapted to receive one of said compliant probes.
14. The electrical probe assembly as set forth in claim 10 wherein said insulating substrate includes two or more conducting layers.
15. The electrical probe assembly as set forth in claim 10 further comprising a passive electronic filter mounted to said substrate and in communication between one or more probes in said first row and one or more probes in said second row.
16. The electrical probe assembly as set forth in claim 10 further comprising an active electronic filter mounted to said substrate and in communication between one or more probes in said first row and one or more probes in said second row.
17. The electrical probe assembly as set forth in claim 10 further comprising a microprocessor mounted to said substrate and in communication between one or more probes of said first row and one or more probes of said second row.
18. The electrical probe assembly as set forth in claim 10 further comprising active and passive electronic components mounted to said substrate and in communication between one or more probes of said first row and one or more probes of said second row.