Nitride-based semiconductor light-emitting device and method of fabricating the same
A nitride-based semiconductor light-emitting device capable of stabilizing transverse light confinement is obtained. This nitride-based semiconductor light-emitting device comprises an emission layer, a cladding layer, formed on the emission layer, including a first nitride-based semiconductor layer and having a current path portion and a current blocking layer, formed to cover the side surfaces of the current path portion, including a second nitride-based semiconductor layer, while the current blocking layer is formed in the vicinity of the current path portion and a region having no current blocking layer is included in a region not in the vicinity of the current path portion. Thus, the width of the current blocking layer is reduced, whereby strain applied to the current blocking layer is relaxed. Consequently, the thickness of the current blocking layer can be increased, thereby stabilizing transverse light confinement.
1. A nitride-based semiconductor light-emitting device comprising:
an emission layer;
a first p-type cladding layer, formed on said emission layer, having a substantially flat upper surface;
a dielectric blocking layer, formed on said first p-type cladding layer, formed to have a first opening for serving as a current path portion;
a semiconductor layer absorbing light emitted from said emission layer, formed on said dielectric blocking layer, and formed to have a second opening for serving as a current path portion; and
a second p-type cladding layer, formed on said first p-type cladding layer and said semiconductor layer in said first opening of said dielectric blocking layer and said second opening of said semiconductor layer for serving as a current path portion.
2. The nitride-based semiconductor light-emitting device according to claim 1 , wherein
said semiconductor layer contains N and at least one element selected from a group consisting of B, Ga, Al, In and Tl.
3. The nitride-based semiconductor light-emitting device according to claim 1 , wherein said dielectric blocking layer includes an oxide film or a nitride film containing at least one element selected from a group consisting of Si, Ti and Zr.