Bottom electrode for MRAM device and method to fabricate it
View Patent ↗Formation of a bottom electrode for an MTJ device on a silicon nitride substrate is facilitated by including a layer of ruthenium near the silicon nitride surface. The ruthenium is a good electrical conductor and it responds differently from Ta and TaN to certain etchants. Adhesion to SiN is enhanced by using a TaN/NiCr bilayer as “glue”. Thus, said included layer of ruthenium may be used as an etch stop layer during the etching of Ta and/or TaN while the latter materials may be used to form a hard mask for etching the ruthenium without significant corrosion of the silicon nitride surface.
1. A process for forming multiple electrodes on a silicon nitride substrate having a top surface, comprising:
cleaning said top surface through sputter cleaning;
depositing a layer of NiCr on said top surface
depositing a layer of ruthenium on said NiCr layer;
depositing a first layer of alpha tantalum on said ruthenium layer;
depositing a first layer of tantalum nitride on said first layer of alpha tantalum;
forming on said top surface a photoresist mask that defines said multiple electrodes;
then performing first reactive ion etching by means of an etchant selected from the group consisting of gaseous compounds of carbon and fluorine whereby all unprotected areas of alpha tantalum and tantalum nitride are etched at an etch rate that is reduced by a factor of about 10 when said ruthenium layer becomes exposed, at which point terminating first reactive ion etching;
then removing all remaining photoresist; and
then performing second reactive ion etching by means of an etchant selected from the group consisting of gaseous compounds of carbon, oxygen, and hydrogen whereby all exposed material is etched at an etch rate that is reduced by a factor of terminating second reactive ion etching with minimal penetration of said silicon nitride substrate.
2. The process recited in claim 1 wherein said ruthenium layer has a thickness between about 20 and 150 Angstroms.
3. The process recited in claim 1 wherein said first layer of alpha tantalum has a thickness between about 100 and 200 Angstroms.
4. The process recited in claim 1 wherein said first layer of tantalum nitride has a thickness between about 100 and 150 Angstroms.
5. The process recited in claim 1 wherein said first etchant is CF 4 .
6. The process recited in claim 1 wherein said second etchant is CH 3 OH.
7. The process recited in claim 1 wherein said layer of NiCr has a thickness between about 20 and 30 Angstroms.