Structure for encapsulating microelectronic devices
View Patent ↗According to an embodiment disclosed herein, a microelectronic device to be encapsulated is built on, or alternatively in, a substrate. The device is then coated with a sacrificial layer. A lid layer is deposited over the sacrificial layer, and then appropriately perforated to optimize the removal of the sacrificial layer. The sacrificial layer is then removed using one of several etching or other processes. The perforations in the lid layer are then sealed using a viscous sealing material, thereby fixing the environment that encapsulates the device. The sealing material is then cured or hardened. An optional moisture barrier may be deposited over the cured sealing layer to provide further protection for the encapsulation if needed.
1. A structure comprising:
a microelectronic device formed on or within a substrate, wherein said microelectronic device has one surface in physical contact with said substrate and one surface exposed from said substrate;
a lid including a plurality of sealed perforations, said lid enclosing a cavity surrounding said microelectronic device surface exposed from said substrate and said lid separated from said microelectronic device by a distance greater than a width of said sealed perforations;
a sealing layer encompassing said lid on all sides and attached to said substrate; and
a moisture barrier encompassing said sealing layer.
2. The structure of claim 1 wherein said lid forms a seal at locations where said lid is attached to said substrate.
3. The structure of claim 2 wherein said seal is hermetic.
4. The structure of claim 1 wherein said sealing layer forms a seal at locations where said sealing layer is attached to said substrate.
5. The structure of claim 1 wherein said moisture barrier is further attached to one side of said substrate.
6. The structure of claim 5 wherein said moisture barrier forms a hermetic seal with said substrate.
7. The structure of claim 1 wherein said device has only one surface in physical contact with said substrate.
8. An encapsulation structure comprising:
a microelectronic device formed on or within a substrate, wherein said microelectronic device has one surface in physical contact with said substrate;
a lid encapsulating said microelectronic device, wherein said lid encloses a cavity surrounding said microelectronic device;
a sealing layer encompassing said lid on all sides and attached to said substrate, wherein said lid further comprises a plurality of sealed perforations and is separated from said microelectronic device by a distance greater than a width of said sealed perforations; and
a moisture barrier encompassing said sealing layer.
9. The encapsulation structure of claim 8 wherein said lid forms a seal at locations where said lid is attached to said substrate.
10. The encapsulation structure of claim 9 wherein said seal is hermetic.
11. The encapsulation structure of claim 8 wherein said sealing layer forms a seal at locations where said sealing layer is attached to said substrate.
12. The encapsulation structure of claim 8 wherein said moisture barrier is further attached to one side of said substrate.
13. The encapsulation structure of claim 12 wherein said moisture barrier forms a hermetic seal with said substrate.