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App. No. 11/551,114 · Confirmation No. 9774

REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2012-03-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-02-21 PA.. Power of Attorney 1 View
2012-02-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-21 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2012-01-20 ABN Abandonment 2 View
2012-01-06 WFEE Fee Worksheet (SB06) 2 View
2012-01-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-12-09 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2011-12-09 FOR Foreign Reference 1 View
2011-12-09 FOR Foreign Reference 10 View
2011-12-09 WFEE Fee Worksheet (SB06) 2 View
2011-12-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-12-09 TRAN.LET Transmittal Letter 5 View
2011-07-06 CTFR Final Rejection 13 View
2011-07-06 FWCLM Index of Claims 2 View
2011-07-06 SRFW Search information including classification, databases and other search related notes 1 View
2011-04-19 TRAN.LET Transmittal Letter 1 View
2011-04-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-04-19 CLM Claims 4 View
2011-04-19 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2011-04-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-04-19 WFEE Fee Worksheet (SB06) 1 View
2011-01-19 CTNF Non-Final Rejection 12 View
2011-01-19 892 List of references cited by examiner 1 View
2011-01-19 SRNT Examiner's search strategy and results 3 View
2011-01-19 FWCLM Index of Claims 2 View
2011-01-19 SRFW Search information including classification, databases and other search related notes 1 View
2010-11-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-11-08 CLM Claims 4 View
2010-11-08 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2010-11-08 WFEE Fee Worksheet (SB06) 2 View
2010-11-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-11-08 XT/ Extension of Time 1 View
2010-11-08 WFEE Fee Worksheet (SB06) 1 View
2010-11-08 WFEE Fee Worksheet (SB06) 1 View
2010-07-08 CTNF Non-Final Rejection 9 View
2010-07-08 892 List of references cited by examiner 1 View
2010-07-08 FWCLM Index of Claims 2 View
2010-07-08 BIB Bibliographic Data Sheet 1 View
2010-07-08 SRNT Examiner's search strategy and results 3 View
2010-07-08 1449 List of References cited by applicant and considered by examiner 3 View
2010-07-08 1449 List of References cited by applicant and considered by examiner 5 View
2010-07-08 SRNT Examiner's search strategy and results 9 View
2010-07-08 SRFW Search information including classification, databases and other search related notes 1 View
2010-04-22 CLM Claims 6 View
2010-04-22 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2010-04-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-04-22 TRAN.LET Transmittal Letter 1 View
2010-04-22 ELC. Response to Election / Restriction Filed 1 View
2010-03-22 CTRS Requirement for Restriction/Election 8 View
2010-03-22 FWCLM Index of Claims 2 View
2010-02-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2010-02-10 TRAN.LET Transmittal Letter 1 View
2010-02-10 TRAN.LET Transmittal Letter 2 View
2010-02-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-02-10 FOR Foreign Reference 50 View
2010-02-10 FOR Foreign Reference 38 View
2009-03-10 TRAN.LET Transmittal Letter 2 View
2009-03-10 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2009-03-10 FOR Foreign Reference 16 View
2009-03-10 FOR Foreign Reference 4 View
2009-03-10 FOR Foreign Reference 5 View
2009-03-10 FOR Foreign Reference 5 View
2009-03-10 FOR Foreign Reference 22 View
2009-03-10 FOR Foreign Reference 34 View
2009-03-10 FOR Foreign Reference 5 View
2009-03-10 N417 Electronic Filing System Acknowledgment Receipt 3 View
2009-03-10 LET. Miscellaneous Incoming Letter 1 View
2008-04-24 NTC.PUB Notice of Publication 1 View
2007-06-27 APP.FILE.REC Filing Receipt 3 View
2007-06-26 APP.FILE.REC Filing Receipt 3 View
2007-06-20 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2007-06-20 OATH Oath or Declaration filed 15 View
2007-06-20 WFEE Fee Worksheet (SB06) 2 View
2007-06-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-06-20 136A Authorization for Extension of Time all replies 2 View
2007-01-16 DRW Drawings-only black and white line drawings 7 View
2007-01-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-12-20 APP.FILE.REC Filing Receipt 3 View
2006-12-20 PEFN Pre-Exam Formalities Notice 2 View
2006-10-19 DRW Drawings-only black and white line drawings 8 View
2006-10-19 SPEC Specification 27 View
2006-10-19 CLM Claims 6 View
2006-10-19 ABST Abstract 1 View
2006-10-19 WFEE Fee Worksheet (SB06) 2 View
2006-10-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-10-12 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/551,114
Filed
2006-10-19
Pub. No.
US20080092806A1
Art Unit
1715