Granted Patent B2

US 7,736,996 · App. 11/554,847 · Granted Jun 15, 2010

Abstract

Claims (16)

1. A method for transferring of a thin semiconductor layer with damage avoidance comprising:

forming a first heterostructure by depositing a non-graded layer of a material of the formula Si 1−x Ge x on a first substrate and thereafter depositing a monocrystalline epitaxial semiconductor layer on the Si 1−x Ge x layer, wherein 0<x<1;

introducing hydrogen atoms into the first heterostructure and allowing the hydrogen atoms to diffuse into the non-graded layer of Si 1−x Ge x of the first heterostructure, wherein at least one of the introducing and allowing is carried out in conjunction with at least one damage avoidance measure, wherein the at least one damage avoidance measure comprises using a heated catalyst to crack hydrogen (H 2 ), with zero bias or minimal bias to the first heterostructure, and one of poisoning and treating surfaces of a chamber for use in implementing the hydrogenation to minimize H recombination on the surfaces;

bonding the semiconductor layer of the first heterostructure to a second substrate to form a second heterostructure; and

splitting the second heterostructure at said Si 1−x Ge x layer, thereby transferring the semiconductor layer from the first heterostructure to the second substrate, wherein the semiconductor layer comprises a substantially defect free semiconductor layer in response to the at least one damage avoidance measure.

2. The method of claim 1 , further wherein the substantially defect free semiconductor layer is suitable for use in a fully depleted CMOS device application.

3. The method of claim 1 , wherein the at least one damage avoidance measure further comprises using remote plasma hydrogenation.

4. The method of claim 3 , further wherein using the remote plasma hydrogenation comprises using remote glow-discharge plasma.

5. The method of claim 1 , wherein the at least one damage avoidance measure further comprises using a sacrificial layer overlying the first heterostructure, the sacrificial layer being configured to at least achieve one of minimize and eliminate hydrogenation damage in the semiconductor layer yet to be formed, the method further comprising stripping the sacrificial layer subsequent to the hydrogenating and prior to the bonding of the first heterostructure with a second heterostructure.

6. The method of claim 5 , wherein the sacrificial layer comprises oxide.

7. The method of claim 5 , wherein the sacrificial layer comprises one selected from the group consisting of oxide, nitride, photoresist, and combinations thereof.

8. The method of claim 1 , wherein the at least one damage avoidance measure further comprises using a hydrogen (H 2 ) anneal, in place of a plasma H anneal, to minimize plasma damage to the semiconductor layer of the first heterostructure.

9. The method of claim 1 , wherein the at least one damage avoidance measure further comprises using a high keV implant to place the H substantially below the non-graded layer, and following the implant with an anneal to diffuse the H to the non-graded layer, wherein the non-graded layer comprises at least one of a strained-layer and a doped-layer, the non-graded layer further corresponding to a cleavage-layer.

10. The method of claim 1 , wherein the at least one damage avoidance measure further comprises using a remote glow-discharge plasma in a heated chamber for repairing damage as it may be created.

11. The method of claim 10 , wherein using the remote glow-discharge plasma further includes using the remote glow-discharge plasma in the heated chamber with a H 2 anneal for repairing damage as it may be created.

12. The method of claim 11 , wherein using the remote glow-discharge plasma still further includes using one selected from the group consisting of a heated wafer chuck and surface heating of the first heterostructure.

Assignments (22)