Method for production of semiconductor device
View Patent ↗A method for production of a semiconductor device including the steps of: forming a gate insulating film, a polysilicon film and a first insulating film on a silicon substrate; patterning the first insulating film; forming a metal film; forming a silicide layer by reacting the polysilicon film with the metal film; forming a second insulating film after removing an unreacted metal film; removing the second insulating film such that the first insulating film is exposed and the second insulating film remains on a region which is not covered with the first insulating film; forming a gate electrode having a silicide layer on the upper layer side and a polysilicon layer on the lower layer side by carrying out etching using the second insulating film as a mask after removing the first insulating film; forming a third insulating film on the side surface of the gate electrode; and forming an interlayer insulating film and forming a contact hole therein.
1. A method for production of a semiconductor device, comprising the steps of:
forming a gate insulating film, a polysilicon film and a first insulating film on a silicon substrate;
forming on the first insulating film a mask having an opening pattern corresponding to a pattern of a gate electrode which is subsequently formed;
patterning the first insulating film by removing the first insulating film until said polysilicon film is exposed using said mask;
forming on said polysilicon film a metal film for forming a silicide;
forming a silicide layer by reacting said polysilicon film with said metal film contacting a portion not covered with the first insulating film;
removing an unreacted metal film;
forming on the polysilicon film having said silicide layer formed thereon, a second insulating film of which the etching rate is lower than that of the first insulating film in etching for removal of the first insulating film which is subsequently carried out;
removing the second insulating film such that the first insulating film is exposed and the second insulating film remains on a region which is not covered with the first insulating film;
removing the first insulating film by etching;
forming a gate electrode having a silicide layer on the upper layer side and a polysilicon layer on the lower layer side by etching said polysilicon film using the remaining second insulating film as a mask;
forming a third insulating film of which the etching rate is lower than an interlayer insulating film in etching for forming a contact hole in the interlayer insulating film which is subsequently formed, so as to cover at least the side surface of said gate electrode;
forming the interlayer insulating film; and
forming the contact hole in said interlayer insulating film by etching.
2. The method for production of a semiconductor device according to claim 1 , wherein said metal film is a cobalt film or a nickel film.
3. The method for production of a semiconductor device according to claim 1 , wherein the first insulating film is a silicon oxide film, and the second insulating film and the third insulating film are silicon nitride films.
4. The method for production of a semiconductor device according to claim 1 , wherein said contact hole is provided so as to extend to the top of silicon substrate between adjacent gate electrodes, and the opening diameter of the contact hole is larger than the minimum spacing between the gate electrodes.
5. The method for production of a semiconductor device according to claim 1 , wherein the method comprises a step of forming a side wall insulating film on the side surface of the second insulating film after the step of removing the first insulating film by etching, and in the step of forming said gate electrode, said polysilicon film is dry-etched using the side wall insulating film and the second insulating film as a mask such that said silicide layer is not exposed.