Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner
View Patent ↗The present invention provides a method of forming a rigid interconnect structure, and the device therefrom, including the steps of providing a lower metal wiring layer having first metal lines positioned within a lower low-k dielectric; depositing an upper low-k dielectric atop the lower metal wiring layer; etching at least one portion of the upper low-k dielectric to provide at least one via to the first metal lines; forming rigid dielectric sidewall spacers in at least one via of the upper low-k dielectric; and forming second metal lines in at least one portion of the upper low-k dielectric. The rigid dielectric sidewall spacers may comprise of SiCH, SiC, SiNH, SiN, or SiO 2 . Alternatively, the via region of the interconnect structure may be strengthened with a mechanically rigid dielectric comprising SiO 2 , SiCOH, or doped silicate glass.
1. A method of forming an interconnect structure comprising the steps of:
providing a lower metal wiring layer having first metal lines positioned within a lower low-k dielectric;
depositing a mechanically rigid dielectric atop said lower metal wiring layer;
forming at least one via through said mechanically rigid dielectric to a portion of said first metal lines; and
forming an upper metal wiring layer having second metal lines positioned within a upper low-k dielectric, said second metal lines being electrically connected to said first metal lines through said via, wherein said via comprises a metal having a coefficient of thermal expansion that substantially matches said mechanically rigid dielectric, wherein said lower low-k dielectric and said upper low-k dielectric comprises the same or different dielectric material comprising a b-staged polymer having about 95% carbon or a SiCOH carbon doped oxide.
2. The method of claim 1 wherein said mechanically rigid dielectric comprises a coefficient of thermal expansion ranging from about 0.1 ppm/° C. to about 5.0 ppm/° C.
3. The method of claim 1 wherein said mechanically rigid dielectric comprises SiO 2 , SiCOH, or doped silicate glass.
4. The method of claim 1 wherein said mechanically rigid dielectric has a thickness ranging from about 100 nm to about 1000 nm.
5. The method of claim 1 wherein said upper low-k dielectric and said lower low-k dielectric have a dielectric constant of less than about 3.5.
6. The method of claim 1 wherein said second metal lines, said first metal lines or a combination of said second metal lines and said first metal lines comprise copper, aluminum, silver, gold or alloys thereof.