Fully and uniformly silicided gate structure and method for forming same
View Patent ↗Fully and uniformly silicided gate conductors are produced by deeply “perforating” silicide gate conductors with sub-lithographic, sub-critical dimension, nanometer-scale openings. A silicide-forming metal (e.g. cobalt, tungsten, etc.) is then deposited, polysilicon gates, covering them and filling the perforations. An anneal step converts the polysilicon to silicide. Because of the deep perforations, the surface area of polysilicon in contact with the silicide-forming metal is greatly increased over conventional silicidation techniques, causing the polysilicon gate to be fully converted to a uniform silicide composition. A self-assembling diblock copolymer is used to form a regular sub-lithographic nanometer-scale pattern that is used as an etching “template” for forming the perforations.
1. A method of forming fully and uniformly silicided gate conductors on a semiconductor device, comprising the steps of:
providing a semiconductor device comprising a silicon substrate and one or more gate stacks formed on the silicon substrate, said one or more gate stacks each further comprising a gate conductor overlying a thin gate dielectric, said thin gate dielectric spacing the gate conductor away from a corresponding channel region defined in the silicon substrate;
disposing a layer of a self-assembling diblock copolymer overlying the one or more gate conductors, said diblock copolymer is a PS-PMMA block copolymer;
annealing the diblock copolymer layer to cause it to organize itself into a repeating pattern of nanometer-scale polymer structures;
developing the diblock copolymer layer to form a repeating pattern of nanometer-scale openings therein;
selectively etching, using the developed copolymer layer as an etching template, to form nanometer-scale perforations extending into the one or more gate conductors, then depositing a silicide-forming metal over the one or more gate conductors, the selectively etching step including a reactive ion etch (RIE);
selecting the silicide-forming metal from the group consisting of Ni, Ti, Pt, Co, Ta and alloys of said metals;
saliciding to convert said one or more gate conductors to silicide, the one or more gate conductors are polysilicon prior to silicidation;
wherein said step of saliciding is accomplished by means of a high-temperature rapid thermal anneal (RTA); and
disposing a hardmask layer overlying the one or more gate conductors prior to disposing the diblock copolymer layer.