Method of forming metal line of semiconductor device
View Patent ↗A method of forming a metal line, in which a nitride layer is used instead of a metal barrier layer, enabling a metal line structure with a relatively low resistance and therefore realizing a high integration of a device. In the method of forming the metal line of the semiconductor device, a first insulating layer and a second insulating layer with a different etch selectivity are sequentially formed on a semiconductor substrate. Predetermined regions of the first insulating layer and the second insulating layer are sequentially etched to form a contact hole. A metal barrier layer is formed on the entire surface including the contact hole. A first metal material is deposited on the entire surface to gap-fill the contact hole. The first metal material on the second insulating layer is stripped such that the first metal material remains only within the contact hole, thus forming a contact plug. A metal line is formed on a predetermined region of the second insulating layer including the contact plug.
1. A method of forming a metal line of a semiconductor device, the method comprising the steps of:
sequentially forming a first insulating layer and a second insulating layer with different etch selectivities on a semiconductor substrate;
sequentially etching predetermined regions of the first insulating layer and the second insulating layer to form a contact hole;
forming a metal barrier layer on the entire surface including the contact hole;
depositing a first metal material on the entire surface so that the contact hole is gap-filled;
stripping the first metal material on the second insulating layer so that the first metal material remains only within the contact hole, thus forming a contact plug; and
forming a metal line on a predetermined region of the second insulating layer including the contact plug.
2. The method of claim 1 , comprising, when the contact plug is formed, stripping the metal barrier layer on the second insulating layer.
3. The method of claim 2 , comprising when the metal barrier layer on the second insulating layer is stripped, partially stripping the second insulating layer.
4. The method of claim 3 , wherein a thickness of the second insulating layer, which remains after the second insulating layer is partially stripped, is within a range of 50 Å to 500 Å.
5. The method of claim 1 , comprising stripping the first metal material by a Chemical Mechanical Polishing (CMP) process or an etch-back process.
6. The method of claim 1 , wherein the first metal material is tungsten.
7. The method of claim 1 , comprising forming the metal line by a mask process and an etch process after forming a second metal material on the second insulating layer.
8. The method of claim 7 , wherein the second metal material is tungsten.
9. The method of claim 1 , wherein the first insulating layer is an oxidization layer, and the second insulating layer is a nitride layer.