CMOS image sensor and method for manufacturing the same
View Patent ↗A CMOS image sensor and a method for manufacturing the same are provided. The CMOS image sensor may be capable of improved thickness uniformity form microlenses formed at a reduced distance from the photodiodes. The CMOS image sensor can include: a semiconductor substrate on which a pixel array is formed, the pixel array including photodiodes formed on the semiconductor substrate to different depths for sensing red, green, and blue signals, respectively; an interlayer dielectric formed on the semiconductor substrate and having a trench at an upper portion of the pixel array; an insulating layer sidewall formed at a side of the trench; and a plurality of microlenses formed on the interlayer dielectric in the trench at predetermined intervals.
1. A CMOS (complementary metal oxide silicon) image sensor, comprising:
a pixel array formed in a semiconductor substrate;
an interlayer dielectric formed on the semiconductor substrate and having a trench at an upper portion of the pixel array;
an insulating layer sidewall disposed only at sidewalls of the trench of the interlayer dielectric; and
a plurality of microlenses formed on the interlayer dielectric in the trench.
2. The CMOS image sensor according to claim 1 , further comprising a passivation layer formed on the interlayer dielectric except for at the upper portion of the pixel array.
3. The CMOS image sensor according to claim 1 , wherein the insulating layer sidewall has a slope angle ranging from 40 to 70 degrees.