Polishing apparatus and substrate processing method
A polishing apparatus detects the escape of a substrate from a top ring during polishing. The polishing apparatus includes a polishing table having a polishing pad, a top ring, and a substrate escape detection section for detecting escape of the substrate from the top ring. The detection section includes a light irradiation member for irradiating an area of the upper surface of the polishing pad with light, a controller for controlling the light irradiation of the light irradiation member, an image-taking member for taking an image of the area irradiated with the light, and an information processing member for processing information outputted from the image-taking member. The controller controls the light irradiation member in such a manner that it performs light irradiation at least for a period of time during which the substrate is regarded as being in contact with the polishing pad.
1. A method for detecting escape of a substrate from a top ring, the method comprising:
holding a substrate with a top ring;
starting irradiating light by a light irradiation member when the top ring starts lowering or when a predetermined time has elapsed after the top ring has started lowering;
starting taking a continuous image of an area irradiated with the light and detecting the escape of the substrate from the top ring by processing information on the continuous image when a predetermined time has elapsed after the starting of the irradiating of the light by the light irradiation member;
performing polishing of the substrate by pressing the substrate held by the top ring against a polishing pad of a polishing table while moving the substrate and the polishing pad relative to each other;
after completion of the polishing of the substrate, stopping the taking of the continuous image and the detecting of the escape of the substrate from the top ring when the top ring starts rising or when a predetermined time has elapsed after the top ring has started rising; and
stopping the irradiating of the light by the light irradiating member when a predetermined time has elapsed after the stopping of the taking of the continuous image.
2. A polishing apparatus comprising:
a polishing table having a polishing pad;
a top ring for holding a substrate and pressing the substrate against the polishing pad; and
a substrate escape detection section for detecting escape of the substrate from the top ring, the substrate escape detection section including
(i) a light irradiation member for irradiating light to an area of an upper surface of the polishing pad,
(ii) a controller for controlling the light irradiated by the light irradiation member,
(iii) an image-taking member for taking a continuous image of the area irradiated with the light, and
(iv) an information processing member for processing information outputted from the image-taking member,
wherein the controller controls the light irradiation member in such a manner that the light irradiation member starts the irradiating of the light when the top ring starts lowering before polishing of the substrate or when a predetermined time has elapsed after the top ring has started lowering, and stops the irradiating of the light when a predetermined time has elapsed after a stop of the taking of the continuous image by the image-taking member, and
wherein the controller controls the image-taking member in such a manner that the image-taking member starts the taking of the continuous image of the area irradiated with the light when a predetermined time has elapsed after the start of the irradiating of the light by the light irradiation member, and stops the taking of the continuous image when the top ring starts rising after completion of the polishing of the substrate or when a predetermined time has elapsed after the top ring has started rising.
3. The polishing apparatus according to claim 2 , wherein the light irradiation member irradiates with the light only the area of the upper surface of the polishing pad that is in the vicinity of a periphery of the top ring.
4. A substrate processing apparatus comprising:
the polishing apparatus according to claim 2 ; and
a housing having in its peripheral wall an observation window for observation of inside the housing and housing at least the polishing apparatus in a darkroom condition,
wherein the observation window is provided with a light-shielding member for shielding against external light.
5. The substrate processing apparatus according to claim 4 , wherein the light-shielding member is a light-shielding sheet attached to the observation window.
6. A substrate processing apparatus comprising:
the polishing apparatus according to claim 3 ; and
a housing having in its peripheral wall an observation window for observation of inside the housing and housing at least the polishing apparatus in a darkroom condition;
wherein the observation window is provided with a light-shielding member for shielding against external light.
7. The substrate processing apparatus according to claim 6 , wherein the light-shielding member is a light-shielding sheet attached to the observation window.