IP Library Granted Patent US 7,541,824
Granted Patent B2
US 7,541,824 · App. 11/639,010 · Granted Jun 2, 2009

Forced air cooling of components on a probecard

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Quick Facts
Patent No.
US 7,541,824
App. No.
11/639,010
Granted
Jun 2, 2009
Kind
B2
Abstract

A probe card with an air channel over the active components for cooling the active components on the probe card is provided.

Claims (19)

1. An assembly comprising:

a probe card, the probe card having a first side and a second side, the first side having a set of contacts thereon for connecting to an interface of a test head;

at least one component on the second side of the probe card;

an air channel mounted on the probe card over the at least one component on the second side of the probe card;

an air intake in communication with the air channel; and

an air outlet in communication with the air channel;

wherein the air intake is configured to be coupled in flow communication with an air flow device to provide a flow of air through the air channel causing cooling of the at least one component and a flow of air out the air outlet.

2. An assembly as recited in claim 1 wherein the air outlet is on the first side of the probe card.

3. An assembly as recited in claim 1 wherein the air channel is an annular channel.

4. An assembly as recited in claim 3 wherein the air channel has a substantially U shaped cross section.

5. An assembly as recited in claim 1 wherein the of contacts are provided by interface connectors on the first side of the probe card.

6. An assembly comprising:

a probe card, the probe card having a first side and a second side, the first side having a set of contacts thereon for connecting to an interface of a test head;

at least one device requiring heat dissipation on the second side of the probe card;

an annular air channel with a U-shaped cross section mounted on the probe card over the at least one device on the second side of the probe card;

an air intake in communication with the air channel; and

an air outlet in communication with the air channel;

wherein the air intake is configured to be coupled in flow communication with an air flow device to provide a flow of air through the air channel causing cooling of the at least one component and a flow of air out the air outlet.

7. An assembly as recited in claim 6 wherein the air outlet is on the first side of the probe card.

Assignments (3)
CHANGE OF ADDRESS Recorded Dec 18, 2018
From: ADVANTEST CORPORATION
To: ADVANTEST CORPORATION
Reel/Frame 047987/0626 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE ADDRESS PREVIOUSLY RECORDED AT REEL: 035371 FRAME: 0265. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Apr 14, 2015
From: ADVANTEST (SINGAPORE) PTE. LTD.
To: ADVANTEST CORPORATION
Reel/Frame 035425/0768 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 6, 2015
From: ADVANTEST (SINGAPORE) PTE. LTD.
To: ADVANTEST CORPORATION
Reel/Frame 035371/0265 →