MIM capacitor manufacturing method
View Patent ↗Disclosed are an MIM (Metal-Insulator-Metal) capacitor and a method of manufacturing the same. The MIM capacitor includes: a lower metal layer and a lower metal interconnection on a substrate; a barrier metal layer on the lower metal layer; an insulating layer on the barrier metal layer; an upper metal layer on the insulating layer; an interlayer dielectric layer having a via hole on the lower metal interconnection; and a plug in the via hole.
1. A method of manufacturing an MIM capacitor, the method comprising the steps of:
forming a lower metal layer and a lower metal interconnection on a substrate;
forming a barrier metal layer that covers a top surface and a sidewall of the lower metal layer by (1) forming the barrier metal layer on the entire surface of the substrate, including the lower metal layer and the lower metal interconnection, and (2) removing the barrier metal layer from the lower metal interconnection;
forming an interlayer dielectric layer having a via hole on the lower metal interconnection;
forming an insulating layer on the barrier metal layer; and
forming a plug in the via hole and an upper metal layer on the insulating layer.
2. The method of claim 1 , further comprising a step of planarizing the upper metal layer and the plug after forming the upper metal layer and the plug.
3. The method of claim 1 , further comprising a step of forming an uppermost metal layer on the upper metal layer and the plug.
4. The method of claim 3 , wherein the step of forming the lower metal layer and the lower metal interconnection on the substrate comprises depositing a metal layer on the substrate, selectively etching the metal layer, thereby forming a lower metal layer and a lower metal interconnection spaced apart from each other.
5. The method of claim 3 , wherein the barrier metal layer includes a Ti layer and/or a TiN layer.
6. The method of claim 3 , wherein the insulating layer comprises a SiON layer.
7. The method of claim 6 , wherein, forming the SiON layer comprises forming an oxide layer using O 3 , then reacting the oxide layer with NH 3 gas under a plasma atmosphere.
8. The method of claim 3 , wherein the step of forming the interlayer dielectric layer comprises the sub-steps of:
forming a dielectric layer on the barrier metal layer and the lower metal interconnection;
selectively etching the dielectric layer, thereby forming a via hole over the lower metal interconnection; and
removing the dielectric layer from the barrier metal layer.
9. The method of claim 3 , wherein the lower metal layer and the lower metal interconnection include an Al alloy, a layer of Ti and/or TiN, or a composite layer thereof.
10. A method of manufacturing a MIM capacitor, comprising the steps of:
forming a lower metal layer and a lower metal interconnection on a substrate;
forming a barrier metal layer on the lower metal layer;
forming a dielectric layer having a via hole on the lower metal interconnection;
forming an insulating layer that comprises a SiON layer on the barrier metal layer by forming an oxide layer using O 3 , then reacting the oxide layer with NH 3 gas under a plasma atmosphere; and
forming a plug in the via hole and an upper metal layer on the insulating layer.
11. The method of claim 10 , farther comprising planarizing the upper metal layer and the plug after forming the upper metal layer and the plug.
12. The method of claim 10 , further comprising forming an uppermost metal layer on the upper metal layer and the plug.
13. The method of claim 12 , wherein the step of forming the lower metal layer and the lower metal interconnection on the substrate comprises depositing a metal layer on the substrate, selectively etching the metal layer, thereby forming a lower metal layer and a lower metal interconnection spaced apart from each other.
14. The method of claim 12 , wherein the step of forming the barrier metal layer comprises covering a top surface and a sidewall of the lower metal layer with the barrier metal layer.
15. The method of claim 14 , wherein the step of forming the barrier metal layer on the lower metal layer comprises the sub-steps of:
forming the baffler metal layer on the entire surface of the substrate, including the lower metal layer and the lower metal interconnection; and
removing the barrier metal layer from the lower metal interconnection.
16. The method of claim 12 , wherein the barrier metal layer includes a Ti layer and/or a TiN layer.
17. The method of claim 12 , wherein the step of forming the interlayer dielectric layer comprises the sub-steps of:
forming a dielectric layer on the barrier metal layer and the lower metal interconnection;
selectively etching the dielectric layer, thereby forming a via hole over the lower metal interconnection; and
removing the dielectric layer from the barrier metal layer.
18. The method of claim 12 , wherein the lower metal layer and the lower metal interconnection include an Al alloy, a layer of Ti and/or TiN, or a composite layer thereof.