Circuit board, semiconductor device, and manufacturing method of circuit board
View Patent ↗A circuit board includes a semiconductor substrate which has a plurality of through holes passing from an upper surface to a lower surface thereof. A plurality of wiring lines are provided on the upper surface of the semiconductor substrate and have bottomed cylindrical portions located within regions corresponding to the through holes. Bottom surfaces of the bottomed cylindrical portions of the wiring lines serve as connection pad portions.
1. A circuit board comprising:
a semiconductor substrate which includes a plurality of through holes passing from an upper surface to a lower surface thereof;
at least one foundation insulating film formed on the upper surface of the semiconductor substrate and on inner peripheral surfaces of the through holes;
a plurality of foundation metal layers formed on the at least one foundation insulating film in the through holes and on the upper surface of the semiconductor substrate;
a plurality of first wiring lines which are provided on the foundation metal layers on an upper side of the semiconductor substrate, and which have bottomed cylindrical portions located in at least lower parts of the through holes, wherein bottoms of the bottomed cylindrical portions of the first wiring lines constitute connection pad portions;
a plurality of solder balls provided on lower surfaces of the connection pad portions of the first wiring lines;
a plurality of columnar electrodes provided on the first wiring lines on the upper side of the semiconductor substrate;
an insulating film provided between the columnar electrodes on the semiconductor substrate and in inner spaces of the bottomed cylindrical portions of the first wiring lines in the through holes; and
a plurality of second wiring lines which are provided on the insulating film and which are connected to the columnar electrodes.
2. The circuit board according to claim 1 , wherein the bottoms of the bottomed cylindrical portions of the first wiring lines are flush with the lower surface of the semiconductor substrate.
3. The circuit board according to claim 1 , wherein the bottoms of the bottomed cylindrical portions of the first wiring lines in the lower parts of the through holes outwardly project from a lower surface side of the semiconductor substrate, and wherein a protective film is provided on the lower surface of the semiconductor substrate.
4. The circuit board according to claim 1 , further comprising a lower overcoat film covering the lower surface of the semiconductor substrate, and the bottoms of the bottomed cylindrical portions of the the first wiring lines except for parts where the solder balls are provided.
5. A semiconductor device comprising:
(i) a circuit board which includes:
a semiconductor substrate which includes a plurality of through holes passing from an upper surface to a lower surface thereof,
at least one foundation insulating film formed on the upper surface of the semiconductor substrate and on inner peripheral surfaces of the through holes,
a plurality of foundation metal layers formed on the at least one foundation insulating film in the through holes and on the upper surface of the semiconductor substrate,
a plurality of first wiring lines which are provided on the foundation metal layers on an upper side of the semiconductor substrate, and which have bottomed cylindrical portions located in at least lower parts of the through holes, wherein bottoms of the bottomed cylindrical portions of the first wiring lines constitute connection pad portions,
a plurality of solder balls provided on lower surfaces of the connection pad portions of the first wiring lines,
a plurality of columnar electrodes provided on the first wiring lines on the upper side of the semiconductor substrate,
an insulating film provided between the columnar electrodes on the semiconductor substrate and in inner spaces of the bottomed cylindrical portions of the first wiring lines in the through holes, and
a plurality of second wiring lines which are provided on the insulating film and which are connected to the columnar electrodes; and
(ii) a semiconductor construct mounted on the circuit board and electrically connected to the columnar electrodes.
6. The semiconductor device according to claim 5 , wherein the semiconductor construct is connected to the columnar electrodes via bonding wires.
7. The semiconductor device according to claim 5 , wherein the bottoms of the bottomed cylindrical portions of the first wiring lines are flush with the lower surface of the semiconductor substrate.
8. The semiconductor device according to claim 5 , further comprising a lower overcoat film covering the lower surface of the semiconductor substrate, and the bottoms of the bottomed cylindrical portions of the the first wiring lines except for parts where the solder balls are provided.
9. The semiconductor device according to claim 7 , further comprising a lower overcoat film covering the lower surface of the semiconductor substrate, and the bottoms of the bottomed cylindrical portions of the the first wiring lines except for parts where the solder balls are provided.
10. The semiconductor device according to claim 2 , further comprising a lower overcoat film covering the lower surface of the semiconductor substrate, and the bottoms of the bottomed cylindrical portions of the the first wiring lines except for parts where the solder balls are provided.