Gate structure in a trench region of a semiconductor device and method for manufacturing the same
View Patent ↗Disclosed are a gate structure in a trench region of a semiconductor device and method for manufacturing the same. The semiconductor device includes a pair of drift regions formed in a semiconductor substrate; a trench region formed between the pair of drift regions; an oxide layer spacer on sidewalls of the trench region; a gate formed in the trench region; and a source and a drain formed in the pair of the drift regions, respectively.
1. A semiconductor device comprising:
first and second drift regions in a semiconductor substrate;
a trench region between the first and second drift regions;
an oxide layer spacer on sidewalls of the trench region;
an insulating layer below the trench region;
a gate in the trench region;
a sidewall spacer on sidewalls of the gate, wherein the sidewall spacer comprises silicon nitride; and
a source in one of the first and second drift regions and a drain in the other of the first and second drift regions.
2. The semiconductor device according to claim 1 , wherein the trench region has a depth that is equal to or less than that of the first and second drift regions.
3. The semiconductor device according to claim 1 , wherein the first and second drift regions are spaced apart from each other in a horizontal direction.
4. The semiconductor device according to claim 3 , wherein the first and second drift regions are symmetrical to each other.
5. The semiconductor device according to claim 1 , wherein the first and second drift regions each have a depth that is greater than a width thereof.
6. The semiconductor device according to claim 1 , further comprising an oxide layer adjacent to the trench region.
7. The semiconductor device according to claim 6 , wherein a part of the gate is on an upper surface of the oxide layer.
8. The semiconductor device according to claim 1 , wherein the width of the trench is less than the length of the oxide layer.
9. A semiconductor device comprising:
first and second drift regions in a semiconductor substrate;
a trench region between the first and second drift regions;
an oxide layer spacer on sidewalls of the trench region;
an insulating layer below the trench region;
an oxide layer adjacent to the trench region;
a gate in the trench region and in part on an upper surface of the oxide layer; and
a source in one of the first and second drift regions and a drain in the other of the first and second drift regions.
10. The semiconductor device according to claim 9 , wherein the trench region has a depth that is equal to or less than that of the first and second drift regions.
11. The semiconductor device according to claim 9 , wherein the first and second drift regions are spaced apart from each other in a horizontal direction.
12. The semiconductor device according to claim 11 , wherein the first and second drift regions are symmetrical to each other.
13. The semiconductor device according to claim 9 , wherein the first and second drift regions each have a depth that is greater than a width thereof.
14. The semiconductor device according to claim 9 , further comprising a sidewall spacer on sidewalls of the gate above the oxide layer.
15. The semiconductor device according to claim 14 , wherein the sidewall spacer comprises silicon nitride.