Non-volatile memory device
View Patent ↗Provided is a non-volatile memory device that can repetitively perform data write and erase operations in an embedded semiconductor device. In the non-volatile memory device, a device isolation region isolates a first active region and a second active region formed on a semiconductor substrate. A transistor electrode is formed on a first insulating layer in the first active region. A first capacitor electrode is formed on a second insulating layer in the first active region. A second capacitor electrode is formed on a third insulating layer in the second active region and electrically connected to the transistor electrode and the first capacitor electrode.
1. A non-volatile memory device comprising:
a semiconductor substrate;
a device isolation region isolating a first active region and a second active region formed on the semiconductor substrate;
a well region having a first type dopant formed in both the first active region and the second active region;
a junction region having a second type dopant formed on the well region, wherein the second type of dopant is opposite to the first type dopant;
a sense transistor for read operation formed in the first active region comprising a first insulating layer, a polysilicon gate, a drain region and a source region,
a first capacitor electrode for electric charge or discharge during write/erase operation formed in the first active region sharing the drain region of the sense transistor, and a tunneling insulating layer formed between the tunneling gate and the junction region;
a second capacitor electrode for voltage coupling formed in the second active region, and a second insulating layer formed between the second capacitor electrode and the junction region;
a first metal line which connects the sense transistor to the second capacitor electrode and a second metal line which connects the first capacitor electrode to the second capacitor electrode, the first metal line and the second metal line being physically separated,
wherein the second capacitor electrode is disposed not to overlap the device isolation region in order to reduce parasitic capacitance,
wherein the drain region is spaced apart from the polysilicon gate by a predetermined distance and is enclosed by the junction region to mitigate the electric field, and the drain region and the source region have the second type dopant;
wherein the polysilicon gate of the sense transistor, the first capacitor electrode and second capacitor electrode are configured to be physically separated from one another and isolated by the device isolation region.
2. The non-volatile memory device according to claim 1 , further comprising:
a word line metal connected to the junction region to apply high voltage or ground voltage to the junction region;
a bit line connected to the drain region to apply high voltage or ground voltage to the drain region; and
a source line connected to the source region for floating the source region of the sense transistor.
3. The non-volatile memory device according to claim 1 , wherein the first type dopant is P-type and the second type dopant is N-type.
4. The non-volatile memory device according to claim 1 , further comprising:
a select transistor electrode formed on a fourth third insulating layer in the first active region.
5. The non-volatile memory device according to claim 1 , wherein the second capacitor electrode acts as a control gate for coupling a voltage applied to the junction region during a write/erase operation.