Static random access memory and method for manufacturing the same
View Patent ↗Disclosed is a static random access memory (SRAM), which includes first and second access transistors composed of metal oxide semiconductor (MOS) transistors, first and second drive transistors composed of MOS transistors, and first and second p-channel thin film transistors (TFTs) used as pull-up devices. The SRAM includes a ground potential layer disposed as a common source of the first and second drive transistors, and formed by implanting a dopant into a semiconductor substrate, a power supply potential layer connected with sources of the first and second p-channel TFTs, and an insulating layer formed on the substrate and interposed between the ground potential layer and the power supply potential layer.
1. A static random access memory (SRAM), comprising:
a substrate;
first and second metal oxide semiconductor (MOS) access transistors on the substrate;
first and second MOS drive transistors having a ground potential layer as a common source;
first and second p-channel transistors configured as pull-up devices;
a power supply potential layer connected to sources of the first and second p-channel transistors, wherein the first and second drive transistors have gates disposed opposite to each other on opposite sides of the power supply potential layer; and
an insulating layer on the substrate, between the ground potential layer and the power supply potential layer, wherein the insulating layer has a lenticular shape, and opposite ends of the insulating layer each have a bird's beak.
2. The SRAM as claimed in claim 1 , wherein the substrate is a semiconductor substrate, and the ground potential layer comprises a dopant implant region in the semiconductor substrate.
3. The SRAM as claimed in claim 1 , wherein the ground potential layer and the power supply potential layer are parallel to each other.
4. The SRAM as claimed in claim 1 , wherein the insulating layer comprises an oxide layer.
5. The SRAM as claimed in claim 4 , wherein the oxide layer comprises a thermal oxide.
6. The SRAM as claimed in claim 1 , wherein the first and second p-channel transistors comprise p-channel thin film transistors (TFTs).
7. The SRAM as claimed in claim 1 , wherein the ground potential layer is directly below the power supply potential layer, across the insulating layer.
8. The SRAM as claimed in claim 1 , wherein the power supply potential layer is located approximately in a middle portion of an active region of the substrate.
9. The SRAM as claimed in claim 1 , wherein the first p-channel transistor is on a portion of the first access transistor and a portion of the first drive transistor, and a second p-channel transistor is on a portion of the second access transistor and a portion of the second drive transistor.
10. The SRAM as claimed in claim 9 , further comprising first and second contacts on an uppermost surface of the first and second p-channel transistors, respectively.
11. The SRAM as claimed in claim 1 , further comprising insulating layers between the power supply potential layer and each of the first and second drive transistor gates.
12. The SRAM as claimed in claim 1 , wherein a drain of the first access transistor and a drain of the first drive transistor comprise a first n-type dopant implant region, and a drain of the second access transistor and a drain of the second drive transistor comprise a second n-type dopant implant region.
13. The SRAM as claimed in claim 12 , wherein the first p-channel transistor comprises a first p-type region on or over the first n-type dopant implant region, and the second p-channel transistor comprises a second p-type region on or over the second n-type dopant implant region.
14. The SRAM as claimed in claim 12 , wherein the ground potential layer has a greater depth than the first and second n-type dopant implant regions.
15. The SRAM as claimed in claim 1 , wherein the insulating layer has an equal or greater width than the ground potential layer.
16. The SRAM as claimed in claim 1 , wherein the first and second drive transistors gates are parallel to each other.
17. The SRAM as claimed in claim 16 , wherein the first and second drive transistor gates are parallel to the ground potential layer.
18. The SRAM as claimed in claim 16 , wherein the first and second access transistors have gates that are parallel to the first and second drive transistor gates.