Wiring glass substrate for connecting a semiconductor chip to a printed wiring substrate and a semiconductor module having the wiring glass substrate
A wiring glass substrate includes a glass substrate formed of glass and having a plurality of holes formed at predetermined positions, bumps so formed as to be connected to a conductive material filling the holes and wirings formed on a surface opposite to a surface having the bumps formed thereon and electrically connecting a plurality of connection terminals arranged in intervals different from intervals of the holes to the conductive material. The shape of the conductive material is porous and porous electrodes are bonded to the inner wall surfaces of the holes by an anchor effect to increase the strength of the glass substrate.
1. A wiring glass substrate for connecting a semiconductor chip to a printed wiring substrate, comprising:
a substrate formed of first glass and having a plurality of holes formed at predetermined positions;
an electrically conductive material embedded in said holes;
bumps so formed as to be connected to the electrically conductive material filling each of said holes; and
wirings formed on a surface opposite to a surface on which said bumps are formed, for electrically connecting a plurality of connection terminals arranged with intervals different from intervals of said holes to said electrically conductive material;
wherein a shape of said electrically conductive martial is porous; and
wherein second glass is provided in a pore of said electrically conductive material or on a surface of said electrically conductive material, the second glass has a lower softening point than that of the substrate formed of the first glass, and the second glass is crystallized glass.
2. A semiconductor module comprising the wiring glass substrate according to claim 1 , wherein the wiring glass substrate on which the semiconductor chip is mounted is connected to the printed wiring board.