Conforming template for patterning liquids disposed on substrates
View Patent ↗The present invention includes a conforming template for patterning liquids disposed on substrates. The template includes a body having opposed first and second surfaces. The first surface includes a plurality of recessed regions with a patterning region being disposed between adjacent recessed regions. Specifically, the recessed regions define flexure regions about which each patterning region may move independent of the remaining patterning regions of the template. In one embodiment the template is mounted to a fluid chamber having an inlet and a throughway. The template is connected to the throughway and the inlet is connected to a fluid source to facilitate deformation of the template to conform to a profile of a surface adjacent thereto.
1. A system comprising:
a substrate having a plurality of droplets positioned thereon;
a mold assembly, spaced-apart from said substrate, for imprinting a pattern in a deformable material, said mold assembly having first and second surfaces, with said first surface including at least one recessed region and said second surface defining a patterning region configured to provide the pattern in the deformable material; and
a mold deformation enabling apparatus coupled to said mold assembly to facilitate deformation of said mold assembly to conform to a layer formed from said plurality of droplets, wherein said mold deformation enabling apparatus includes a chamber having an inlet and a throughway, with said mold assembly being connected to said throughway.
2. The system as recited in claim 1 further including a source of fluid in fluid communication with said chamber through said inlet.
3. The system as recited in claim 1 wherein said chamber comprises a plurality of walls, with said plurality of walls being more rigid than said mold assembly.
4. The system as recited in claim 1 wherein said mold assembly comprises a body having opposed first and second surfaces, with said first surface including a plurality of recessed regions defining a plurality of flexures with a region of said second surface disposed between adjacent recessed regions defining a patterning region.
5. The system as recited in claim 4 wherein said patterning region has a profile selected from a set of profiles including smooth, planar, and patterned.
6. The system as recited in claim 4 wherein said patterning region covers an area of said second surface that has a polygonal shape.
7. The system as recited in claim 4 further including a plurality of said patterning regions arranged in a two-dimensional array.
8. The system as recited in claim 1 wherein said pattern comprises protrusions and recessions having submicron dimensions.
9. A system comprising:
a mold assembly for imprinting a pattern in a deformable material, said mold assembly having first and second surfaces, with said first surface including at least one recessed region and said second surface defining a patterning region configured to provide the pattern in the deformable material; and
a mold deformation enabling apparatus coupled to said mold assembly to facilitate deformation of said mold assembly to conform to a profile of a surface adjacent to said mold assembly, wherein said mold deformation enabling apparatus includes a chamber having an inlet and a throughway, with said mold assembly being connected to said throughway.
10. The system as recited in claim 9 wherein said surface further includes a plurality of spaced-apart droplets positioned thereon.
11. The system as recited in claim 9 further including a source of fluid in fluid communication with said chamber through said inlet.
12. The system as recited in claim 9 wherein said chamber comprises a plurality of walls, with said plurality of walls being more rigid than said mold assembly.
13. The system as recited in claim 9 wherein said mold assembly comprises a body having opposed first and second surfaces, with said first surface including a plurality of recessed regions defining a plurality of flexures with a region of said second surface disposed between adjacent recessed regions defining a patterning region.
14. The system as recited in claim 13 wherein said patterning region has a profile selected from a set of profiles including smooth, planar, and patterned.
15. The system as recited in claim 13 wherein said patterning region covers an area of said second surface that has a polygonal shape.
16. The system as recited in claim 13 further including a plurality of said patterning regions arranged in a two-dimensional array.
17. The system as recited in claim 9 wherein said pattern comprises protrusions and recessions having submicron dimensions.
18. A system comprising:
a substrate having a plurality of droplets positioned thereon;
a mold assembly, spaced-apart from said substrate, for imprinting a pattern in a deformable material, said mold assembly having first and second surfaces, with said first surface including at least one recessed region and said second surface defining a patterning region configured to provide the pattern in the deformable material;
a chamber having an inlet and a throughway, with said template being connected to said throughway to facilitate deformation of said mold assembly to conform to a layer formed from said plurality of droplets;
a source of fluid in fluid communication with said chamber through said inlet; and
a source of radiation to impinge actinic radiation upon said layer.
19. The system as recited in claim 18 wherein said mold assembly comprises a body having opposed first and second surfaces, with said first surface including a plurality of recessed regions defining a plurality of flexures with a region of said second surface disposed between adjacent recessed regions defining a patterning region.