IP Library Granted Patent US 7,539,039
Granted Patent B2
US 7,539,039 · App. 11/694,393 · Granted May 26, 2009

Integrated circuit having a resistive switching device

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,539,039
App. No.
11/694,393
Granted
May 26, 2009
Kind
B2
Abstract

An integrated circuit, a memory cell, memory device and method of operating the memory device is disclosed. In one embodiment, an integrated circuit having a resistively switching memory cell includes a bitline electrode and a second electrode having a lower voltage potential than the bitline electrode; a switching active volume and a selection transistor connected in series between the bitline electrode and the second electrode. The second electrode is connected, via a connection transistor, to a third electrode having the same or a lower voltage potential than the second electrode; wherein the second electrode includes a buried electrode at least partially positioned below the bitline electrode and the third electrode.

Claims (71)

1. An integrated circuit having a resistively switching memory comprising:

a bitline electrode and a second electrode having a lower voltage potential than the bitline electrode;

a switching active volume and a selection transistor connected in series between the bitline electrode and the second electrode;

the second electrode is connected, via a connection transistor, to a third electrode having the same or a lower voltage potential than the second electrode; and

wherein the second electrode comprises a buried electrode at least partially positioned below the bitline electrode and the third electrode.

2. The integrated circuit of claim 1 , comprising wherein a wordline is connected to a gate of the selection transistor.

3. The integrated circuit of claim 2 , comprising wherein the wordline is connected to a gate of the connection transistor.

4. The integrated circuit of claim 2 , comprising wherein another wordline is connected to a gate of the connection transistor.

5. The integrated circuit of claim 1 , comprising wherein at least one out of the selection transistor and the connection transistor is a vertical transistor at least partially guiding a substantially vertical current flow.

6. The integrated circuit of claim 1 , comprising wherein a further switching active volume and the connection transistor are connected in series between the second electrode and the third electrode.

7. The integrated circuit of claim 1 , comprising wherein the bitline electrode and the third electrode are at least partially positioned above a substrate and the second electrode is positioned within the substrate.

8. The integrated circuit of claim 7 , comprising wherein the second electrode comprises doped silicon.

9. The integrated circuit of claim 1 , comprising wherein a form of at least one out of the second electrode and the third electrode comprises at least one of a group consisting of a plate, a line, and a mesh.

10. The integrated circuit of claim 1 , comprising wherein the connection transistor and the selection transistor are at least partially manufactured using the same processes.

11. The integrated circuit of claim 10 , comprising wherein a wordline connected to a gate of the connection transistor and a wordline connected to a gate of the selection transistor are manufactured simultaneously.

12. The integrated circuit of claim 1 , comprising wherein the switching active volume comprises a phase change element.

13. The integrated circuit of claim 1 , comprising wherein the connection transistor is activated when the selection transistor is activated.

14. The integrated circuit of claim 13 , comprising wherein the connection transistor is always activated during operation of the memory cell.

15. A memory device comprising:

a plurality of resistively switching memory cells, each of the resistively switching memory cells comprising:

a bitline electrode and a second electrode common to the set of memory cells having a lower voltage potential than the bitline electrode;

a switching active volume and a selection transistor connected in series between the respective bitline electrode and the common second electrode;

wherein the common second electrode comprises a buried electrode at least partially positioned below each bitline electrode and the third electrode; and

wherein the common second electrode is connected, via at least one associated connection transistor, to a third electrode having the same or a lower voltage potential than the common second electrode.

16. The memory device of claim 15 , comprising wherein a same wordline is connected to a gate of at least one of the selection transistors and a gate of one of the connection transistors.

17. The memory device of claim 15 , comprising wherein a same wordline is connected to gates of a plurality of the connection transistors.

18. The memory device of claim 17 , comprising wherein the wordline connected to the gates of the plurality of the connection transistors is different from a respective wordline of associated selection transistors, and wherein the respective wordlines of the associated selection transistors are each different wordlines.

19. The memory device of claim 15 , comprising wherein at least one out of the selection transistors and the connection transistors is a vertical transistor at least partially having a substantially vertical current flow.

20. The memory device of claim 15 , comprising wherein a further switching active volume and the connection transistor are connected in series between the second electrode and the third electrode.

21. The memory device of claim 15 , comprising wherein the bitline and third electrodes are positioned above a substrate and the second electrode is positioned within the substrate.

22. The memory device of claim 21 , wherein the second electrodes comprises doped silicon.

23. The memory device of claim 15 , wherein a form of at least one out of the second electrodes and the third electrodes comprises at least one out a group comprising a plate, a line, and a mesh.

24. The memory device of claim 15 , comprising wherein the connection transistors and the selection transistors are at least partially manufactured using the same processes.

25. The memory device of claim 24 , comprising wherein the wordlines are manufactured simultaneously.

26. The memory device of claim 15 , wherein the switching active volumes comprises phase change elements.

27. The memory device of claim 15 , comprising wherein the connection transistors are activated during operation of the selection transistors.

28. The memory device of claim 27 , comprising wherein the connection transistors are always activated during operation of the memory device.

29. A method of operating an integrated circuit having a resistively switching memory cell comprising:

a bitline electrode and a second electrode having a lower voltage potential than the bitline electrode;

a switching active volume and a selection transistor connected in series between the bitline electrode and the second electrode;

wherein the second electrode is connected, via a connection transistor, to a third electrode having the same or a lower voltage potential than the second electrode;

wherein the second electrode comprises a buried electrode at least partially positioned below the bitline electrode and the third electrode,

wherein the method comprises:

activating the selection transistor to allow a current flow between the bitline electrode and the second electrode through the switching active volume;

activating the connection transistor such that it selectively allows a current flow between the second and third electrodes;

such that, by simultaneously activating the selection transistor and the connection transistor, a current can flow from the bitline electrode to the third electrode.

30. The method of claim 29 , wherein simultaneously activating the selection transistor and the connection transistor comprises permanently activating the connection transistor.

31. The method of claim 30 , comprising wherein the activating of the selection transistor and the active connection is performed by a same wordline.

32. The method of claim 30 , comprising wherein the activating of the selection transistor and the active connection is performed by different wordlines.

33. The method of claim 30 , comprising wherein a current through the transistors is flowing at least partially in a substantially vertical manner.

34. A method of operating a memory device comprising a plurality of resistively switching memory cells, each of the resistively switching memory cells comprising:

a bitline electrode and a second electrode common to the set of memory cells having a lower voltage potential than the bitline electrode;

a switching active volume and a selection transistor connected in series between the respective bitline electrode and the common second electrode;

wherein the common second electrode is connected, via at least one associated connection transistor, to a third electrode having the same or a lower voltage potential than the common second electrode;

wherein the common second electrode comprises a buried electrode at least partially positioned below each bitline electrode and the third electrode,

wherein the method comprises:

activating the selection transistor of one of the memory cells to allow a current flow between the bitline electrode and the common second electrode through the active volume;

activating the connection transistor of one of the memory cells such that the connection transistor selectively allows a current flow between the second and third electrodes;

such that by simultaneously activating the selection transistor and the connection transistor of one of the memory cells a current can flow from the bitline electrode to the third electrode.

35. The method of claim 34 , comprising simultaneously activating the selection transistor and the connection transistor comprises permanently activating the connection transistor.

36. The method of claim 34 , comprising performing the activating of the selection transistor and the active connection by a same wordline.

37. The method of claim 34 , comprising performing the activating of the selection transistor and the active connection by different wordlines.

38. The method of claim 34 , comprising wherein a current through the transistors is flowing at least partially in a substantially vertical manner.

39. A resistively switching memory cell of a memory device, the resistively switching memory cell comprising:

a first electrical connection means and a second electrical connection means having a lower voltage potential than the first electrical connection means;

a switching active means and a selection means for selectively allowing a current flowing through it connected in series between the fist electrical connection means and the second electrical connection means;

wherein the second electrical connection means is connected, via a connection means for selectively allowing a current flowing through it, to a third electrical connection means having the same or a lower voltage potential than the second electrical connection means;

wherein the second electrical connection means comprises a buried electrode at least partially positioned below the first electrical connection means and the third electrical connection means.

40. The memory cell of claim 39 , comprising wherein an electrical control means is connected to a control input of the selection means.

41. The memory cell of claim 39 , comprising wherein the same electrical control means is connected to a control input of the connection means.

42. The memory cell of claim 39 , comprising wherein a further electrical control means is connected to a control input of the connection means.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2015
From: INFINEON TECHNOLOGIES AG
To: POLARIS INNOVATIONS LIMITED
Reel/Frame 037254/0782 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 8, 2015
From: QIMONDA AG
To: INFINEON TECHNOLOGIES AG
Reel/Frame 035623/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2007
From: GRUENING-VON SCHWERIN, ULRIKE; SCHLOESSER, TILL
To: QIMONDA AG
Reel/Frame 019394/0939 →