IP Library › Granted Patent US 7,802,978
Granted Patent B2
US 7,802,978 · App. 11/694,500 · Granted Sep 28, 2010

Imprinting of partial fields at the edge of the wafer

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Quick Facts
Patent No.
US 7,802,978
App. No.
11/694,500
Granted
Sep 28, 2010
Kind
B2
Abstract

The present invention is directed towards several aspects of imprint lithography that have to be improved to address imprinting of partial fields and dies at the edge of the wafer.

Claims (7)

1. An imprint lithography system comprising a wafer;

an adhesion promoter deposited on the wafer without a raised bead at its edge near an edge of the wafer; and

an imprint lithography template spaced apart from the wafer to be lowered towards the wafer in order to imprint a pattern in an imprint material deposited on the adhesion promoter; and,

a force control system configured to provide asymmetrical forces altering a center of pressure of the imprint lithography template to the center of pressure of the imprint material deposited on the adhesion promoter.

2. The system as recited in claim 1 , wherein the adhesion promoter comprises an optically imagable material.

3. The system as recited in claim 2 , wherein the adhesion promoter comprises a positive tone resist.

4. The system as recited in claim 2 , wherein the adhesion promoter comprises a negative tone resist.

Assignments (11)
ASSIGNMENT OF SECURITY INTEREST IN PATENTS Recorded Nov 7, 2019
From: JPMORGAN CHASE BANK, N.A.
To: CITIBANK, N.A.
Reel/Frame 050967/0138 →
PATENT SECURITY AGREEMENT Recorded Aug 22, 2019
From: MAGIC LEAP, INC.; MOLECULAR IMPRINTS, INC.; MENTOR ACQUISITION ONE, LLC
To: JP MORGAN CHASE BANK, N.A.
Reel/Frame 050138/0287 →
CONFIRMATORY ASSIGNMENT OF JOINT PATENT OWNERSHIP Recorded Apr 27, 2015
From: CANON NANOTECHNOLOGIES, INC.
To: MOLECULAR IMPRINTS, INC.
Reel/Frame 035507/0559 →
CHANGE OF NAME Recorded Jul 30, 2014
From: MII NEWCO, INC.
To: MOLECULAR IMPRINTS, INC.
Reel/Frame 033449/0684 →
CHANGE OF NAME Recorded Jul 24, 2014
From: MOLECULAR IMPRINTS, INC.
To: CANON NANOTECHNOLOGIES, INC.
Reel/Frame 033400/0184 →
ASSIGNMENT OF JOINT OWNERSHIP Recorded Jul 15, 2014
From: MOLECULAR IMPRINTS, INC.
To: MII NEWCO, INC.
Reel/Frame 033329/0280 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNOR AND ASSIGNEE PREVIOUSLY RECORDED ON REEL 033161 FRAME 0705. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 25, 2014
From: CANON INC.
To: MOLECULAR IMPRINTS, INC.
Reel/Frame 033227/0398 →
RELEASE OF SECURITY INTEREST Recorded Jun 13, 2014
From: MOLECULAR IMPRINTS, INC.
To: CANON INC.
Reel/Frame 033161/0705 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE FROM AN "ASSIGNMENT" TO "SECURITY AGREEMENT" PREVIOUSLY RECORDED ON REEL 026842 FRAME 0929. ASSIGNOR(S) HEREBY CONFIRMS THE THE ORIGINAL DOCUMENT SUBMITTED WAS A "SECURITY AGREEMENT". Recorded Aug 13, 2013
From: MOLECULAR IMPRINTS, INC.
To: CANON INC.
Reel/Frame 031003/0031 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 1, 2011
From: MOLECULAR IMPRINTS, INC.
To: CANON INC.
Reel/Frame 026842/0929 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 30, 2007
From: SREENIVASAN, SILDGATA V.; CHOI, BYUNG-JIN
To: MOLECULAR IMPRINTS, INC.
Reel/Frame 019095/0052 →