Method for manufacturing semiconductor package capable of potting thermosetting resin while being heated
View Patent ↗In an apparatus for manufacturing a semiconductor package including a semiconductor chip electronically and mechanically mounted on a tape-automated bonding tape, a resin potting unit is adapted to pot thermosetting resin into a gap between the semiconductor chip and the tape-automated bonding tape while the semiconductor chip and the tape-automated bonding tape are heated.
1. A method for manufacturing a semiconductor package, comprising, in order:
electronically and mechanically connecting a semiconductor chip to a tape-automated bonding tape;
potting thermosetting resin into a gap between said semiconductor chip and said tape-automated bonding tape while said semiconductor chip and said tape-automated bonding tape are at a first temperature above a resin viscosity decrease start temperature of said thermosetting resin and less than a second temperature at which said thermosetting resin is calcined and hardened; and
performing a baking operation upon said thermosetting resin by increasing a temperature of said thermosetting resin to said second temperature.
2. The method as set forth in claim 1 , wherein said first temperature is between about 60° C. and 120° C.
3. The method as set forth in claim 1 , wherein said thermosetting resin is a non-solvent thermosetting resin.
4. The method as set forth in claim 1 , wherein said semiconductor chip and said tape-automated bonding tape are heated to said first temperature for no more than about 3 seconds.