Electronic substrate, semiconductor device, and electronic device
View Patent ↗An electronic substrate including: a base substrate having an active face and a rear face; and a plurality of inductor elements formed on or above the active face, or formed on or above the rear face.
1. An electronic substrate comprising:
a base substrate having an active face and a rear face;
a passivation film formed on the active face of the base substrate;
a plurality of inductor elements formed on or above the active face, or formed on or above the rear face, and having a winding wire, the winding wire having an inner end and an outer end;
a first electrode and a second electrode formed in an array at a peripheral portion of the active face of the base substrate;
a first connecting wire formed on the passivation film and connected to the first electrode;
a dielectric layer formed between at least some of the inductor elements and the base substrate so as to cover the first connecting wire, including a through hole in which the inner end of the winding wire is connected to the first connecting wire; and
a second connecting wire connected to the outer end of the winding wire, connected to the second electrode, and formed on the dielectric layer.
2. The electronic substrate according to claim 1 , wherein
the inductor elements include:
a first inductor element; and
a second inductor element having an inductance value or an applicable frequency that are different from that of the first inductor element.
3. The electronic substrate according to claim 2 , wherein
the first inductor element is used for external power transmission, and the second inductor element is used for external communications.
4. The electronic substrate according to claim 2 , further comprising:
a connection terminal formed on the base substrate, used for external power transmission, wherein
the first inductor element and the second inductor element are used for external communications.
5. The electronic substrate according to claim 1 , wherein:
the dielectric layer is made of material having a dielectric dissipation factor smaller than that of the base substrate.
6. The electronic substrate according to claim 1 , wherein the inductor elements include:
a first inductor element; and
a second inductor element, wherein the number of turns in the winding wire of the second inductor element is more than that of the winding wire in the first inductor element.
7. A semiconductor device, comprising:
a plurality of electronic substrates, each of which includes:
a base substrate having an active face and a rear face;
a passivation film formed on the active face of the base substrate:
a plurality of inductor elements formed on or above the active face, or on or above the rear face, and having a winding wire, the winding wire having an inner end and an outer end;
a first electrode and a second electrode formed in an array at a peripheral portion of the active face of the base substrate;
a first connecting wire formed on the passivation film and connected to the first electrode;
a dielectric layer formed between at least some of the inductor element and the base substrate so as to cover the first connecting wire, including a through hole in which the inner end of the winding wire is connected to the first connecting wire; and
a second connecting wire connected to the outer end of the winding wire, connected to the second electrode, and formed on the dielectric layer,
wherein the electronic substrates are disposed so as to be laminated, the inductor element functions as an antenna sending or receiving electromagnetic waves so as to send or receive signals between the electronic substrates.
8. The semiconductor device according to claim 7 , wherein the inductor elements formed on a pair of the electronic substrates sending or receiving signals are disposed to face each other.