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App. No. 11/715,852 · Confirmation No. 6348

Semiconductor manufacturing apparatus and pattern formation method

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2011-03-22 ABN Abandonment 2 View
2010-08-19 CTNF Non-Final Rejection 17 View
2010-08-19 892 List of references cited by examiner 1 View
2010-08-19 FOR Foreign Reference 136 View
2010-08-19 SRFW Search information including classification, databases and other search related notes 1 View
2010-08-19 SRNT Examiner's search strategy and results 8 View
2010-01-25 RCEX Request for Continued Examination (RCE) 1 View
2010-01-25 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2010-01-25 CLM Claims 4 View
2010-01-25 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2010-01-25 WFEE Fee Worksheet (SB06) 2 View
2010-01-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-01-25 WFEE Fee Worksheet (SB06) 1 View
2009-10-27 CTFR Final Rejection 15 View
2009-10-27 892 List of references cited by examiner 1 View
2009-10-27 FWCLM Index of Claims 1 View
2009-10-27 SRFW Search information including classification, databases and other search related notes 1 View
2009-10-27 SRNT Examiner's search strategy and results 8 View
2009-08-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2009-08-17 CLM Claims 3 View
2009-08-17 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2009-08-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-08-17 WFEE Fee Worksheet (SB06) 1 View
2009-05-15 CTNF Non-Final Rejection 19 View
2009-05-15 892 List of references cited by examiner 2 View
2009-05-15 FWCLM Index of Claims 1 View
2009-05-15 SRFW Search information including classification, databases and other search related notes 1 View
2009-05-15 BIB Bibliographic Data Sheet 1 View
2009-05-15 SRNT Examiner's search strategy and results 9 View
2009-05-15 1449 List of References cited by applicant and considered by examiner 1 View
2009-05-15 FOR Foreign Reference 16 View
2007-07-05 NTC.PUB Notice of Publication 1 View
2007-04-26 WFEE Fee Worksheet (SB06) 1 View
2007-03-29 APP.FILE.REC Filing Receipt 3 View
2007-03-09 WFEE Fee Worksheet (SB06) 1 View
2007-03-09 WFEE Fee Worksheet (SB06) 1 View
2007-03-09 TRNA Transmittal of New Application 3 View
2007-03-09 A.PE Preliminary Amendment 1 View
2007-03-09 SPEC Specification 1 View
2007-03-09 CLM Claims 4 View
2007-03-09 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2007-03-09 SPEC Specification 26 View
2007-03-09 CLM Claims 5 View
2007-03-09 ABST Abstract 1 View
2007-03-09 DRW Drawings-only black and white line drawings 13 View
2007-03-09 OATH Oath or Declaration filed 3 View
2007-03-09 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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Quick Facts
App. No.
11/715,852
Filed
2007-03-09
Pub. No.
US20070153245A1
Art Unit
2882